PROCEDE ET DISPOSITIF DE DEPOT PAR PLASMA A LA RESONANCE CYCLOTRON ELECTRONIQUE DE COUCHES DE TISSUS DE NANOFIBRES DE CARBONE ET COUCHES DE TISSUS AINSI OBTENUS
    1.
    发明授权
    PROCEDE ET DISPOSITIF DE DEPOT PAR PLASMA A LA RESONANCE CYCLOTRON ELECTRONIQUE DE COUCHES DE TISSUS DE NANOFIBRES DE CARBONE ET COUCHES DE TISSUS AINSI OBTENUS 有权
    方法和设备纺织品从碳纳米纤维的到图层ECR PLASMAAUFBRINGEN层和纺织品

    公开(公告)号:EP1192637B1

    公开(公告)日:2008-07-23

    申请号:EP00949577.1

    申请日:2000-06-29

    IPC分类号: H01J37/32 H05H1/46 C01B31/02

    摘要: The invention concerns a method and a device for electronic cyclotronic resonance plasma deposit of carbon nanofibres or nanotubes in fabric form, on a catalyst-free substrate, by microwave power injection into a deposit chamber comprising a magnetic structure with a highly unbalanced magnetic mirror, and at least an electronic cyclotronic resonance inside said deposit chamber itself and opposite said substrate, whereby, under pressure less than 10-4 mbar, the carbon-containing gas in said magnetic mirror at the centre of the deposit chamber is ionised and/or dissociated, thereby producing species which will be deposited on said substrate which is heated. The invention further concerns a layer, optionally on a substrate, formed of a fabric or array of carbon nanofibres or nanotubes interconnected as in a web, said layer being catalyst-free and having multiple layers-or a multilayer structure - comprising at least two layers of carbon nanofibres or nanotubes in fabric form, and filters, nanogrids accelerating or decelerating electrons and flat displays comprising such layers or structures.

    PROCEDE ET DISPOSITIF DE DEPOT PAR PLASMA A LA RESONANCE CYCLOTRON ELECTRONIQUE DE COUCHES DE TISSUS DE NANOFIBRES DE CARBONE ET COUCHES DE TISSUS AINSI OBTENUS
    5.
    发明公开
    PROCEDE ET DISPOSITIF DE DEPOT PAR PLASMA A LA RESONANCE CYCLOTRON ELECTRONIQUE DE COUCHES DE TISSUS DE NANOFIBRES DE CARBONE ET COUCHES DE TISSUS AINSI OBTENUS 有权
    方法和设备纺织品从碳纳米纤维的到图层ECR PLASMAAUFBRINGEN层和纺织品

    公开(公告)号:EP1192637A1

    公开(公告)日:2002-04-03

    申请号:EP00949577.1

    申请日:2000-06-29

    IPC分类号: H01J37/32 H05H1/46 C01B31/02

    摘要: The invention concerns a method and a device for electronic cyclotronic resonance plasma deposit of carbon nanofibres or nanotubes in fabric form, on a catalyst-free substrate, by microwave power injection into a deposit chamber comprising a magnetic structure with a highly unbalanced magnetic mirror, and at least an electronic cyclotronic resonance inside said deposit chamber itself and opposite said substrate, whereby, under pressure less than 10-4 mbar, the carbon-containing gas in said magnetic mirror at the centre of the deposit chamber is ionised and/or dissociated, thereby producing species which will be deposited on said substrate which is heated. The invention further concerns a layer, optionally on a substrate, formed of a fabric or array of carbon nanofibres or nanotubes interconnected as in a web, said layer being catalyst-free and having multiple layers-or a multilayer structure - comprising at least two layers of carbon nanofibres or nanotubes in fabric form, and filters, nanogrids accelerating or decelerating electrons and flat displays comprising such layers or structures.