公开(公告)号：EP1373960A1

公开(公告)日：2004-01-02

申请号：EP02722224.9

申请日：2002-03-15

申请人： Carl Zeiss Microelectronic Systems GmbH

发明人： ENGEL, Thomas ,  HERBIG, Volker

IPC分类号： G02B21/00

CPC分类号： G02B21/0024 ,  G02B21/008

摘要： The invention relates to a method for evaluating layers of images (A, B, C, D, E) which are microscopically recorded from levels of different depths in the focusing device of an object. Each layer of image (A, B, C, D, E) is composed of a plurality of picture elements (Aij, Bij, Cij, Dij, Eij); an intensity value is determined for each picture element (Aij, Bij, Cij, Dij, Eij) or image area comprising several such picture elements (Aij, Bij, Cij, Dij, Eij), the intensity values for the picture element (Aij, Bij, Cij, Dij, Eij) or image areas disposed on top of each other in the direction z are combined, a characterisitc parameter (Aij, Bij, Cij, Dij, Eij) for said picture elements or image areas is determined and arranged in a grid which corresponds to the grid of the picture elements (Aij, Bij, Cij, Dij, Eij). The invention enables information concerning the topography of an object to be obtained and represented.