利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

4 条记录 (耗时 0.011 秒)

    VERFAHREN ZUR AUSWERTUNG VON SCHICHTBILDERN
    1.
    发明公开
    VERFAHREN ZUR AUSWERTUNG VON SCHICHTBILDERN 审中-公开
    程序。评估胶片影像

    公开(公告)号：EP1373960A1

    公开(公告)日：2004-01-02

    申请号：EP02722224.9

    申请日：2002-03-15

    申请人： Carl Zeiss Microelectronic Systems GmbH

    发明人： ENGEL, Thomas ,  HERBIG, Volker

    IPC分类号： G02B21/00

    CPC分类号： G02B21/0024 ,  G02B21/008

    摘要： The invention relates to a method for evaluating layers of images (A, B, C, D, E) which are microscopically recorded from levels of different depths in the focusing device of an object. Each layer of image (A, B, C, D, E) is composed of a plurality of picture elements (Aij, Bij, Cij, Dij, Eij); an intensity value is determined for each picture element (Aij, Bij, Cij, Dij, Eij) or image area comprising several such picture elements (Aij, Bij, Cij, Dij, Eij), the intensity values for the picture element (Aij, Bij, Cij, Dij, Eij) or image areas disposed on top of each other in the direction z are combined, a characterisitc parameter (Aij, Bij, Cij, Dij, Eij) for said picture elements or image areas is determined and arranged in a grid which corresponds to the grid of the picture elements (Aij, Bij, Cij, Dij, Eij). The invention enables information concerning the topography of an object to be obtained and represented.

    EINRICHTUNG ZUR FLÄCHIGEN BELEUCHTUNG EINES OBJEKTFELDES
    2.
    发明公开
    EINRICHTUNG ZUR FLÄCHIGEN BELEUCHTUNG EINES OBJEKTFELDES 有权
    DEVICE FOR物场的面照明

    公开(公告)号：EP1399771A2

    公开(公告)日：2004-03-24

    申请号：EP02747433.7

    申请日：2002-06-26

    申请人： Carl Zeiss Microelectronic Systems GmbH

    发明人： ENGEL, Thomas ,  HARNISCH, Wolfgang ,  HEISE, Jürgen

    IPC分类号： G02B21/06

    CPC分类号： G02B21/06 ,  Y10S385/901

    摘要： The invention relates to a device for flat illumination of an object field in an optical apparatus and to an optical apparatus having said device, said optical apparatus being, for example, microscopes, including microlithography simulation microscopes, wherein a flat illumination, i.e. extending over a singular object point, of the object to be examined is required. The device comprises a laser light source (8) and a fiber optic cable (9) having at least one optic fiber through which the light is guided from the laser light source (8) to the object field. The optic fiber is configured and designed in such a way that the intensity of the illumination light is increasingly homogenized in the cross section of the optical fiber during its course from the end on the incidence side to the end on the radiation side and the illumination light from the end on the radiation side of optical fiber is directed to the object (O) with substantially homogenous intensity distribution.

    MIKROSKOPOBJEKTIVANORDNUNG
    3.
    发明公开
    MIKROSKOPOBJEKTIVANORDNUNG 有权
    显微镜物镜安排

    公开(公告)号：EP1373961A2

    公开(公告)日：2004-01-02

    申请号：EP02787138.3

    申请日：2002-07-19

    申请人： Carl Zeiss Microelectronic Systems GmbH

    发明人： ENGEL, Thomas

    IPC分类号： G02B21/02 ,  G02B21/36

    CPC分类号： G02B21/02 ,  G02B21/362

    摘要： A microscope lens arrangement consisting of a microscope lens (1) which can be placed in a working position in such a way that a sample (7) arranged in the field of view of said microscope lens (1) can be detected . A video camera (12; 22; 25; 32) which is coupled to the microscope lens (1) is provided. Said video camera can detect at least one part of the field of view without the aid of the lens when the microscope lens (1) is in a working position.