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公开(公告)号：EP2579271B8
公开(公告)日：2019-05-22
申请号：EP12190694.5
申请日：2004-09-07
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公开(公告)号：EP2579270B8
公开(公告)日：2019-05-22
申请号：EP12190693.7
申请日：2004-09-07
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公开(公告)号：EP2579273B8
公开(公告)日：2019-05-22
申请号：EP12190696.0
申请日：2004-09-07
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公开(公告)号：EP2575143B8
公开(公告)日：2019-05-22
申请号：EP12190689.5
申请日：2004-09-07
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公开(公告)号：EP2579269B8
公开(公告)日：2019-05-22
申请号：EP12190692.9
申请日：2004-09-07
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公开(公告)号：EP2579271B1
公开(公告)日：2018-04-11
申请号：EP12190694.5
申请日：2004-09-07
发明人： Knippelmeyer, Rainer , Kienzle, Oliver , Kemen, Thomas , Müller, Heiko , Uhlemann, Stephan , Haider, Maximilian , Casares, Antonio , Rogers, Steven
IPC分类号： G21K5/10 , G01N23/00 , H01J37/28 , H01J37/09 , H01J37/317 , H01J37/04 , H01J37/14 , H01J37/10
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical component comprises at least one multi-aperture plate having a plurality of apertures formed therein, each for manipulating particles of a charged particle beamlet passing therethrough; wherein the multi-aperture plate comprises plural conductive layer portions arranged substantially in a single plane, wherein plural apertures are formed in each of the plural conductive layer portions, and wherein a resistant gap is formed between adjacent conductive layer portions.
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7.发明授权Particle-optical systems and arrangements and particle-optical components for such systems and arrangements 有权用于这种系统和布置的粒子光学系统和布置以及粒子光学部件
公开(公告)号：EP2579273B1
公开(公告)日：2017-11-29
申请号：EP12190696.0
申请日：2004-09-07
发明人： Knippelmeyer, Rainer , Kienzle, Oliver , Kemen, Thomas , Müller, Heiko , Uhlemann, Stephan , Haider, Maximilian , Casares, Antonio , Rogers, Steven
IPC分类号： G21K5/10 , G01N23/00 , H01J37/28 , H01J37/09 , H01J37/317 , H01J37/12 , H01J37/14 , H01J37/10
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical component comprises at least one multi-aperture plate having a plurality of apertures formed therein, each for manipulating particles of a charged particle beamlet passing therethrough; wherein the multi-aperture plate comprises plural conductive layer portions arranged substantially in a single plane, wherein plural apertures are formed in each of the plural conductive layer portions, and wherein a resistant gap is formed between adjacent conductive layer portions.
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公开(公告)号：EP2579269B1
公开(公告)日：2018-01-24
申请号：EP12190692.9
申请日：2004-09-07
发明人： Knippelmeyer, Rainer , Kienzle, Oliver , Kemen, Thomas , Müller, Heiko , Uhlemann, Stephan , Haider, Maximilian , Casares, Antonio , Rogers, Steven
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical component comprises at least one multi-aperture plate having a plurality of apertures formed therein, each for manipulating particles of a charged particle beamlet passing therethrough; wherein the multi-aperture plate comprises plural conductive layer portions arranged substantially in a single plane, wherein plural apertures are formed in each of the plural conductive layer portions, and wherein a resistant gap is formed between adjacent conductive layer portions.
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9.发明授权PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS 有权这些系统和装置的粒子光学系统和装置以及粒子光学元件
公开(公告)号：EP2575144B1
公开(公告)日：2017-07-12
申请号：EP12190690.3
申请日：2004-09-07
发明人： Knippelmeyer, Rainer , Kienzle, Oliver , Kemen, Thomas , Müller, Heiko , Uhlemann, Stephan , Haider, Maximilian , Casares, Antonio , Rogers, Steven
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
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10.发明授权
公开(公告)号：EP2579270B1
公开(公告)日：2018-04-11
申请号：EP12190693.7
申请日：2004-09-07
发明人： Knippelmeyer, Rainer , Kienzle, Oliver , Kemen, Thomas , Müller, Heiko , Uhlemann, Stephan , Haider, Maximilian , Casares, Antonio , Rogers, Steven
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical component comprises at least one multi-aperture plate having a plurality of apertures formed therein, each for manipulating particles of a charged particle beamlet passing therethrough; wherein the multi-aperture plate comprises plural conductive layer portions arranged substantially in a single plane, wherein plural apertures are formed in each of the plural conductive layer portions, and wherein a resistant gap is formed between adjacent conductive layer portions.
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