公开(公告)号：EP1242843B1

公开(公告)日：2006-03-22

申请号：EP00985239.3

申请日：2000-12-22

申请人： Carl Zeiss SMT AG

发明人： SHAFER, David, R. ,  SCHUSTER, Karl-Heinz ,  BEIERL, Helmut

IPC分类号： G02B13/14 ,  G02B13/18 ,  G03F7/20

CPC分类号： G02B17/0892 ,  G02B3/14 ,  G02B13/143 ,  G02B13/18 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70883 ,  G03F7/70933

摘要： The invention relates to a projection lens comprising at least five groups of lenses G1 - G5 and several lens surfaces, in which at least two of the lens surfaces lie adjacent to one another. Said adjacent lens surfaces are referred to as a double aspheric lens. The double aspheric lens or lenses (21) are positioned at a minimum distance from an image plane 0', said distance being greater than the maximum lens diameter (D2) of the lens.

公开(公告)号：EP1430346A1

公开(公告)日：2004-06-23

申请号：EP02799405.2

申请日：2002-09-13

申请人： Carl Zeiss SMT AG

发明人： ULRICH, Wilhelm ,  SHAFER, David, R. ,  EPPLE, Alexander ,  BEIERL, Helmut ,  DODOC, Aurelian

IPC分类号： G02B17/08 ,  G02B27/00

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric projection lens for imaging a pattern arranged in an object plane onto an image plane, preferably while creating a real intermediate image, including a catadioptric first lens section having a concave mirror and a physical beamsplitter having a beamsplitting surface, as well as a second lens section that is preferably refractive and follows the beamsplitter, between its object plane and image plane. Positive refractive power is arranged in an optical near-field of the object plane, which is arranged at a working distance from the first optical surface of the projection lens. The beamsplitter lies in the vicinity of low marginal-ray heights, which allows configuring projection lenses that are fully corrected for longitudinal chromatic aberration, while employing small quantities of materials, particularly those materials needed for fabricating their beamsplitters.

摘要翻译： 一种折反射投影透镜，用于将布置在物平面中的图案成像到图像平面上，优选地同时产生真实中间图像，包括具有凹面镜的反射折射第一透镜部分和具有分束表面的物理分束器，以及第二 透镜部分优选是折射的并且在其物平面和像平面之间跟随分束器。 正屈光力布置在物平面的光学近场中，其被布置在距投影透镜的第一光学表面的工作距离处。 分光镜位于低边缘光线高度附近，可以配置完全校正纵向色差的投影镜头，同时采用少量材料，特别是制造分束器所需的材料。

公开(公告)号：EP1247132B1

公开(公告)日：2006-05-24

申请号：EP00990025.9

申请日：2000-12-23

申请人： Carl Zeiss SMT AG

发明人： SHAFER, David, R.

IPC分类号： G02B17/08

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/0828 ,  G02B17/0844 ,  G02B17/0848 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70358

摘要： Microlithographic reduction projection catadioptric objective, which is devoid of planar folding mirrors and which comprises an aperture plane (stop) on the image side of the most imageward curved mirror (M34). After the most imageward curved mirror (M34) the beam is diverging. The most imageward curved mirror (M34) is convex. The objective consists in sequence from the object side (Ob) to the image side (Im) of a catadioptric group (L31-L35, M31, M32) giving a real intermediate image (Imi), a catoptric or catadioptric group (M33, M34) giving a virtual image, and a dioptric group (FLG') giving a real image.

公开(公告)号：EP1456705A2

公开(公告)日：2004-09-15

申请号：EP02747468.3

申请日：2002-07-19

申请人： Carl Zeiss SMT AG

发明人： SHAFER, David, R. ,  EPPLE, Alexander ,  ULRICH, Wilhelm

IPC分类号： G02B17/08 ,  G03F7/20

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptrical projection lens, which produces an image in an image plane of a model, arranged in an object plane, by generation of a real intermediate image, has a catadioptrical first objective piece, a concave mirror and a beam diverter device between the object plane and the image plane and, beyond the beam diverter device, a dioptrical second objective piece. The beam diverter device has a preferably fully-reflective first mirror surface, for diverting the radiation arriving from the object plane onto the concave mirror. In an optically close region to the object plane, in which the height of the main beam of the radiation emanating from the object is greater than the height of the boundary beam, a positive refractive element is arranged behind the first mirror surface, between the above and the concave mirror. An object-side, telecentric projection lens may thus be produced with relatively small lens dimensions and easily corrected with moderate requirements for the coating of the mirror surfaces.