公开(公告)号：EP3586352A1

公开(公告)日：2020-01-01

申请号：EP17706728.7

申请日：2017-02-21

申请人： Carl Zeiss SMT GmbH

发明人： CHUNG, Hin Yiu Anthony ,  LUNDQUIST, Theodore ,  ALIMAN, Michel ,  ANTONI, Martin ,  FEDOSENKO, Gennady ,  DERPMANN, Valerie ,  REUTER, Rüdiger ,  LAUE, Alexander ,  GORKHOVER, Leonid ,  GORUS, Andreas

IPC分类号： H01J37/32 ,  A61B5/08 ,  H01J49/00

公开(公告)号：EP3292561A1

公开(公告)日：2018-03-14

申请号：EP16710230.0

申请日：2016-03-17

申请人： Carl Zeiss SMT GmbH

发明人： ALIMAN, Michel ,  LAUE, Alexander ,  CHUNG, Hin Yiu Anthony ,  FEDOSENKO, Gennady ,  REUTER, Rüdiger ,  GORKHOVER, Leonid ,  ANTONI, Martin ,  GORUS, Andreas ,  DERPMANN, Valerie

IPC分类号： H01J49/00 ,  H01J49/42 ,  H01J49/02 ,  H01J49/38

CPC分类号： H01J49/38 ,  H01J49/0031 ,  H01J49/027 ,  H01J49/425 ,  H01J49/426 ,  H01J49/427 ,  H01J49/4295

摘要： The invention relates to a method for examining a gas (4) by mass spectrometry, comprising: ionizing the gas (4) for producing ions (4a, 4b), and storing, exciting and detecting at least some of the produced ions (4a, 4b) in an FT ion trap (2). In the method, producing and storing the ions (4a, 4b) in the FT ion trap (2) and/or exciting the ions (4a, 4b) prior to the detection of the ions (4a, 4b) in the FT ion trap (2) comprises at least one selective IFT excitation, in particular a SWIFT excitation (10), which is dependent on the mass-to-charge ratio (m/z) of the ions (4a, 4b). The invention further relates to a mass spectrometer (1).