公开(公告)号：EP2044487B1

公开(公告)日：2011-04-20

申请号：EP07786179.7

申请日：2007-07-19

申请人： Carl Zeiss SMT GmbH

发明人： SCHRIEVER, Martin ,  WEGMANN, Ulrich ,  HEMBACHER, Stefan ,  GEUPPERT, Bernhard ,  HUBER, Jürgen ,  KERWIEN, Norbert ,  TOTZECK, Michael ,  HAUF, Markus

IPC分类号： G03F7/20

CPC分类号： G03F7/70825 ,  G03F7/70041 ,  G03F7/70266

摘要： An optical apparatus has a light source which emits light in the form of light pulses at a pulse repetition frequency and at least one optical element which is connected to apparatuses for excitation of oscillation at an oscillation frequency. The oscillation of the optical element leads to cyclic modulation in time of at least one parameter, which is relevant for optical imaging of the optical element. The oscillation frequency can be adjusted by means of the apparatuses for excitation of an oscillation of the optical element such that it is synchronized to the pulse repetition frequency of the light source. A timer is provided for the pulse repetition frequency of the light pulses, with the timer being connected to at least one frequency multiplier, whose output is connected to the apparatuses for excitation of an oscillation. Furthermore, a method is described for correction or improvement of the imaging behaviour of an optical apparatus.