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1.发明授权RÉSONATEUR À ONDES DE VOLUME EXPLOITANT L'EXCITATION/DÉTECTION DE LA VIBRATION 有权体声波振动激发/ -ERFASSUNG
公开(公告)号：EP2730025B1
公开(公告)日：2015-09-09
申请号：EP12735502.2
申请日：2012-07-06
CPC分类号： H03H9/2405 , B06B1/0292 , H03H9/02259 , H03H9/02409 , H03H9/174 , H03H9/2463
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2.发明公开RÉSONATEUR À ONDES DE VOLUME EXPLOITANT L'EXCITATION/DÉTECTION DE LA VIBRATION 有权体声波振动激发/ -ERFASSUNG
公开(公告)号：EP2730025A1
公开(公告)日：2014-05-14
申请号：EP12735502.2
申请日：2012-07-06
CPC分类号： H03H9/2405 , B06B1/0292 , H03H9/02259 , H03H9/02409 , H03H9/174 , H03H9/2463
摘要： The invention relates to an acoustic volume wave resonator configured so as to resonate at a predetermined work frequency, including: a mounting (12), including a first surface (14) and a second surface (16); a resonating substrate (18), including a first surface (20) and a second surface (22); and a diaphragm (24), rigidly connecting the second surface (16) of the mounting to the first surface (20) of the resonating substrate. The mounting includes an inner cavity (28) and an inner electrode (32) so as to form an air gap area (34) between the inner electrode (24) and a portion (35) of the diaphragm. The resonating substrate is configured so as to generate, between the first surface and second surface thereof, longitudinal-mode sound waves vibrating at the work frequency of the resonator when an electrostatic field having a sine wave component at the work frequency is generated in the air gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate and the inner electrode.
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