METHOD FOR MAKING HALOGEN DOPED OPTICAL ELEMENT

    公开(公告)号:EP3858795A1

    公开(公告)日:2021-08-04

    申请号:EP21157711.9

    申请日:2015-11-24

    摘要: A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 µm and 0.25 µm The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogen containing gas in the closed system at a temperature of less than about 1200°C. The method further includes flowing ore of the halogen dopant gas into the closed system to maintain the pressure. The total pressure in the closed system is between 2.0 and 30 atm.