公开(公告)号：EP2399098A4

公开(公告)日：2017-11-15

申请号：EP09840534

申请日：2009-02-23

Applicant: DIMENSIONAL PHOTONICS INT INC

Inventor： DILLON ROBERT F ,  JUDELL NEIL H K ,  FILLION TIMOTHY I ,  SINGH GURPREET ,  WALLACE NATHAN E

IPC: G01B11/25 ,  G01B11/24 ,  G01J3/02 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/36 ,  G02B26/06 ,  G02B27/00

CPC classification number: G02B26/06 ,  G01B11/2441 ,  G01B11/2527 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/361 ,  G02B27/0068 ,  G02B27/0087 ,  G02B2207/117 ,  G06T2200/04 ,  G06T2200/08

Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

公开(公告)号：EP2401575A4

公开(公告)日：2017-11-15

申请号：EP10746665

申请日：2010-02-19

Applicant: DIMENSIONAL PHOTONICS INT INC

Inventor： DILLON ROBERT F ,  FILLION TIMOTHY I ,  KROHG OLAF N ,  JUDELL NEIL H K

IPC: G01B11/24 ,  G01B11/25

CPC classification number: G01B11/2513 ,  G01B11/2509

Abstract: Described are a method and apparatus for generating a display of a three-dimensional (“3D”) metrology surface. The method includes determining a 3D point cloud representation of a surface of an object in a point cloud coordinate space. An image of the object is acquired in a camera coordinate space and then transformed from the camera coordinate space to the point cloud coordinate space. The transformed image is mapped onto the 3D point cloud representation to generate a realistic display of the surface of the object. In one embodiment, a metrology camera used to acquire images for determination of the 3D point cloud is also used to acquire the image of the object so that the transformation between coordinate spaces is not performed. The display includes a grayscale or color shading for the pixels or surface elements in the representation.