公开(公告)号：EP1336835A1

公开(公告)日：2003-08-20

申请号：EP01972624.9

申请日：2001-09-28

申请人： Daiken Chemical Co., Ltd ,  Seiko Instruments Inc. ,  Nakayama, Yoshikazu

发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio Daiken Chemical Co., Ltd. ,  OKAWA, Takashi DAIKEN Chemical Co., Ltd. ,  TAKANO, Yuichi c/o DAIKEN Chemical Co., Ltd. ,  YASUTAKE, M. SEIKO Instruments Inc.,Oyama Factory ,  SHIRAKAWABE,Y. SEIKO Instruments Inc.Oyama Factory

IPC分类号： G01N13/12 ,  G12B21/04

CPC分类号： G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12

摘要： The present invention realizes a conductive probe for a scanning type microscope, to which a voltage can be applied or a current can flow. In order to accomplish the object, in a conductive probe for a scanning type microscope which captures substance information of the surface of a specimen by the tip end 14a of a conductive nanotube probe needle fastened to a cantilever 4, the conductive probe 20 for the scanning type microscope related to the present invention is characterized in that this conductive probe is constructed from a conductive film 17 formed on the surface of the above described cantilever 4, a conductive nanotube 12, the base end portion 16 of which is fixed in contact with the surface of the necessary portion of the cantilever 4 and a conductive deposit 18 which fastens the conductive nanotube 12 by covering from the base end portion 16 of the nanotube 12 to a part of the above described conductive film 17, and in that the conductive nanotube 12 and the conductive film 17 are electrically connected each other with the conductive deposit 18.