公开(公告)号：EP1271604A4

公开(公告)日：2005-05-25

申请号：EP01978999

申请日：2001-11-02

申请人： EBARA CORP ,  TOSHIBA KK

发明人： YAMAZAKI YUICHIRO ,  WATANABE KENJI ,  SOBUKAWA HIROSI ,  NOJI NOBUHARU ,  SATAKE TOHRU ,  YOSHIKAWA SHOJI ,  KARIMATA TSUTOMU ,  NAKASUJI MAMORU ,  HATAKEYAMA MASAHIRO ,  MURAKAMI TAKESHI ,  NAGAHAMA ICHIROTA ,  NAGAI TAKAMITSU ,  SUGIHARA KAZUYOSHI

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  G01N23/225

CPC分类号： H01J37/28 ,  H01J37/224 ,  H01J37/244 ,  H01J2237/006 ,  H01J2237/20221 ,  H01J2237/2445 ,  H01J2237/2817

摘要： An electron beam inspecting apparatus is a map projection type and comprises a primary electro-optical system which molds an electron beam emitted from an electron gun into a rectangular form and irradiates the surface of a sample to be inspected with the molded electron beam, a secondary electro-optical system which converges secondary electrons emitted from the sample, a detector which converts the converged secondary electrons into an optical image via a fluorescent plate to focus them to a line sensor, and a controller which controls the charge transfer time to transfer a line image captured by a pixel array provided in the line sensor by interlocking with the transfer speed of stage which moves the sample.

摘要翻译： 图像投影类型的电子束检查系统包括：用于从在电子枪发射成矩形构型的电子束成形和施加成形电子束至试样表面待检查一次电子光学系统。 的二次电子光学系统会聚从样品发射的二次电子。 检测器通过荧光屏融合二次电子转换成光学图像上，并且所述图像聚焦到行传感器。 控制器控制在哪的拾取线图像中的每对线传感器设置相关联地用于移动样品的阶段的移动速度的相邻像素行的之间传送的线传感器的电荷转移时间。

公开(公告)号：EP1296352A4

公开(公告)日：2007-04-18

申请号：EP01945627

申请日：2001-06-27

申请人： EBARA CORP ,  TOSHIBA KK

发明人： NAKASUJI MAMORU ,  NOJI NOBUHARU ,  SATAKE TOHRU ,  HATAKEYAMA MASAHIRO ,  KIMBA TOSHIFUMI ,  SOBUKAWA HIROSI ,  YOSHIKAWA SHOJI ,  MURAKAMI TAKESHI ,  WATANABE KENJI ,  KARIMATA TSUTOMU ,  OOWADA SHIN ,  SAITO MUTSUMI ,  YAMAZAKI YUICHIRO ,  NAGAI TAKAMITSU ,  NAGAHAMA ICHIROTA

IPC分类号： G01N23/225 ,  H01J37/06 ,  H01J37/073 ,  H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/29 ,  G01B15/00 ,  H01L21/66

CPC分类号： H01J29/70 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/227 ,  H01J37/06 ,  H01J37/073 ,  H01J37/141 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/266 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/6719 ,  H01L21/67213

摘要： An electron beam inspection apparatus comprising an electrooptical unit (70) comprising an electrooptical system for irradiating an object with a primary electron beam from an electron source and projecting the image of secondary electrons emitted from the object and a detector for detecting the image of secondary electrons projected from the electrooptical system, a stage unit (50) for moving the object relatively to the electrooptical system while holding it a mini-environment unit (20) for blocking adhesion of dust to the object by supplying cleaning gas thereto, a working chamber (31) containing the stage unit and controllable to vacuum atmosphere, at least two loading chambers (41, 42) disposed between the mini-environment unit and the working chamber and controllable independently to vacuum atmosphere, and a loader (60) for feeding the object to the stage unit through the loading chambers.

公开(公告)号：EP1251442A4

公开(公告)日：2006-11-08

申请号：EP00985941

申请日：2000-12-27

申请人： EBARA CORP

发明人： SEKINO HIDEO ,  INOUE SATOSHI ,  YAMAZAKI YUICHIRO ,  OBUCHI MASASHI ,  TODA JUNE ,  SUSAMI SHU ,  YAMANISHI YOSHIE

IPC分类号： B09B5/00 ,  G06Q10/00 ,  G06F17/60

CPC分类号： G06Q10/06 ,  B09B5/00 ,  G06Q10/30 ,  Y02W90/20

摘要： A district assisting system for making a plan of a waste disposal network. Icons (I1 to I3) indicating the kinds of waste are displayed on a monitor screen. The operator selects, e.g., a gasification melting furnace from a disposal facility item box (W2), creates an icon (I4) in a plan sheet box (W1), and draw a line (L1) linking the icon (I1) to the icon (I4). When the operator clicks the icon (I4), the kinds and amounts of residual and valuable substances produced when combustible waste is processed in a gasification melting furnace are displayed. The operator selects the next disposal facility according to the displayed unconnected residual substances, creates an icon of the selected facility on the monitor screen, and links the icon to the icon (I4). Thus a plan is completed.