公开(公告)号：EP3065161B1

公开(公告)日：2018-11-21

申请号：EP15778595.7

申请日：2015-01-09

申请人： Technology Research Association For Future Additive Manufacturing

发明人： SATO, Takashi

IPC分类号： H01J37/06 ,  H01J37/04 ,  H01J1/13 ,  B29C67/00

CPC分类号： H01J37/065 ,  B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1057 ,  B22F2999/00 ,  B33Y30/00 ,  H01J3/08 ,  H01J3/12 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  Y02P10/295 ,  B22F2203/03 ,  B22F2202/06 ,  B22F2202/11

摘要： When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.

公开(公告)号：EP2772930B1

公开(公告)日：2018-07-04

申请号：EP14156445.0

申请日：2014-02-25

申请人： FEI Company

发明人： Maazouz, Mostafa

IPC分类号： H01J37/04 ,  H01J37/305

CPC分类号： H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

摘要： The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

公开(公告)号：EP3246934A1

公开(公告)日：2017-11-22

申请号：EP17170245.9

申请日：2017-05-09

申请人： Jeol Ltd.

发明人： MUKAI, Masaki

IPC分类号： H01J37/06 ,  H01J37/26

CPC分类号： H01J37/24 ,  H01J37/05 ,  H01J37/06 ,  H01J37/147 ,  H01J37/26 ,  H01J37/265 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/057

摘要： There is provided an electron microscope in which a crossover position can be kept constant. The electron microscope (100) includes: an electron source (110) for emitting an electron beam; an acceleration tube (170) having acceleration electrodes (170a-170f) and operative to accelerate the electron beam; a first electrode (160) operative such that a lens action is produced between this first electrode (160) and the initial stage of acceleration electrode (170a); an accelerating voltage supply (112) for supplying an accelerating voltage to the acceleration tube (170); a first electrode voltage supply (162) for supplying a voltage to the first electrode (160); and a controller (109b) for controlling the first electrode voltage supply (162). The lens action produced between the first electrode (160) and the initial stage of acceleration electrode (170a) forms a crossover (CO2) of the electron beam. The controller (109b) controls the first electrode voltage supply (162) such that, if the accelerating voltage is modified, the ratio between the voltage applied to the first electrode (160) and the voltage applied to the initial stage of acceleration electrode (170a) is kept constant.

摘要翻译： 提供了一种电子显微镜，其中交叉位置可以保持恒定。 电子显微镜（100）包括：用于发射电子束的电子源（110） 加速管（170），其具有加速电极（170a-170f）并可操作以加速电子束; 第一电极（160），其操作使得在该第一电极（160）与加速电极（170a）的初始阶段之间产生透镜作用; 加速电压源（112），用于向加速管（170）提供加速电压; 用于向所述第一电极（160）供应电压的第一电极电压供应（162）; 和用于控制第一电极电压源（162）的控制器（109b）。 在第一电极（160）与加速电极（170a）的初始阶段之间产生的透镜作用形成电子束的交叉（CO 2）。 控制器（109b）控制第一电极电压供应（162），使得如果加速电压被修改，则施加到第一电极（160）的电压与施加到加速电极（170a）的初始阶段的电压 ）保持不变。

公开(公告)号：EP2772930A3

公开(公告)日：2017-04-19

申请号：EP14156445.0

申请日：2014-02-25

申请人： FEI Company

发明人： Maazouz, Mostafa

IPC分类号： H01J37/04 ,  H01J37/305

CPC分类号： H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

摘要： The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

公开(公告)号：EP2571041B1

公开(公告)日：2017-04-12

申请号：EP10851436.5

申请日：2010-11-30

申请人： Denka Company Limited

发明人： NONOGAKI Ryozo ,  MORISHITA Toshiyuki

IPC分类号： H01J1/304 ,  H01J1/15 ,  H01J37/06

CPC分类号： H01J1/15 ,  H01J1/304 ,  H01J37/06 ,  H01J2237/06316

公开(公告)号：EP3119440A1

公开(公告)日：2017-01-25

申请号：EP15708231.4

申请日：2015-03-09

申请人： Tetra Laval Holdings & Finance SA

发明人： CLOETTA, Dominique ,  HOSTETTLER, Urs ,  HAAG, Werner ,  BIANCO, Simone

IPC分类号： A61L2/08 ,  H01J29/04 ,  B65B55/08

CPC分类号： B65B55/08 ,  A61L2/087 ,  A61L2/26 ,  A61L2202/11 ,  A61L2202/23 ,  H01J1/15 ,  H01J29/04 ,  H01J33/02 ,  H01J37/06

摘要： Electron beam generator comprising an electron emitting device adapted to emit an electron beam when heated to an elevated temperature, wherein the electron emitting device comprises a filament having a spiral portion.

摘要翻译： 电子束发生器包括适于在加热到高温时发射电子束的电子发射装置（32），其特征在于电子发射装置（32）包括具有螺旋部分（36）的灯丝（34）。

公开(公告)号：EP2077574B1

公开(公告)日：2015-06-17

申请号：EP07830086.0

申请日：2007-10-18

申请人： ULVAC, INC.

发明人： IIJIMA, Eiichi ,  SHEN, Guo Hua ,  SATAKE, Tohru

IPC分类号： H01J37/06 ,  H01J37/04 ,  H01J3/02 ,  H01J37/07 ,  H01J37/304

CPC分类号： H01J37/07 ,  H01J3/026 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/004 ,  H01J2237/182

公开(公告)号：EP2787522A1

公开(公告)日：2014-10-08

申请号：EP12874231.9

申请日：2012-12-31

申请人： Yan, Jianxin

发明人： Yan, Jianxin

IPC分类号： H01J1/304 ,  H01J9/02

CPC分类号： H01J1/304 ,  C23C16/40 ,  H01J1/14 ,  H01J9/025 ,  H01J37/06 ,  H01J2201/30446 ,  H01J2237/06316 ,  Y10T428/2916

摘要： The present invention discloses an electrode material that eases electron injection and does not react with contact substances. The structure of the material includes a conductive substrate plane on the top of which an emissive material is coated. The emissive coating bonds strongly with the substrate plane. The emissive material is of low work function and high chemical stability.

公开(公告)号：EP2312609B1

公开(公告)日：2013-08-28

申请号：EP09172942.6

申请日：2009-10-13

申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

发明人： Adamec, Pavel ,  Liska, Ivo ,  Gluchman, Gennadij ,  Snabl, Milan

IPC分类号： H01J37/06

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

公开(公告)号：EP2444990A1

公开(公告)日：2012-04-25

申请号：EP10187979.9

申请日：2010-10-19

申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

发明人： Lanio, Stefan ,  Frosien, Jürgen

IPC分类号： H01J37/063 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/16

CPC分类号： H01J37/063 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/16 ,  H01J2237/06375

摘要： An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.

摘要翻译： 描述了用于沿光轴发射带电粒子束的发射器组件。 发射器组件被容纳在枪室中并且包括具有发射极尖端的发射器，其中发射极尖端位于垂直于光轴的第一平面处，并且其中发射器被配置为偏置到第一电位，提取器具有 开口，其中所述开口位于垂直于所述光轴的第二平面处，并且其中所述提取器构造成被偏置到第二电位，其中所述第二平面具有距离所述第一平面2.25mm及以上的第一距离。