公开(公告)号：EP0650536A1

公开(公告)日：1995-05-03

申请号：EP92924773.0

申请日：1992-12-02

申请人： ELECTROTECH EQUIPMENTS LIMITED

发明人： DOBSON, Christopher Elberton Old Manor Elberton ,  KIERMASZ, Adrian ,  BEEKMANN, Knut ,  SHEARER, Christine 5 Stanley Street South ,  LING, Edmond ,  WINN, Alan c/o Thornbury Laboratories ,  WILBY, Rob

IPC分类号： C23C16 ,  H01J37

CPC分类号： H01J37/32082 ,  C23C16/5096 ,  C23C16/52 ,  H01J37/32174 ,  H01J37/3299 ,  H01J2237/3328

摘要： A reactor (10) defines a chamber (11) in which are disposed an upper electrode (12) and a lower workpiece electrode (13). The upper electrode is connected to a R.F. supply whilst the lower electrode is connected to a stress control unit (14). The stress control unit is used to adjust or maintain the effective resistance of the connection between the workpiece electrode (13) and ground.