摘要:
A roll to roll fabrication apparatus (100, 200) includes: a vacuum chamber having an installation chamber (110, 210) and a process chamber (120, 220); a preprocessing unit (160, 260) in the installation chamber (110, 210) to process a surface of a film (101, 201) which is transferred to enhance a film (101, 201) characteristic in a subsequent CVD process; a process drum (130, 230) in the process chamber (120, 220) to wind the film (101, 201) thereon; a process treatment unit (132, 232) in the process chamber (120, 220) to form a layer by performing a CVD process on the film (101, 201) wound on the process drum (130, 230); and a plurality of heaters (170a, 170b, 170c; 270a, 270b, 270c) in the installation chamber (110, 210) and the process chamber (120, 220) to gradually increase a temperature of the film (101, 201) wound on the process drum (130, 230) to prevent application of a thermal impact to the film (101, 201) due to the high-temperature process drum (130, 230).
摘要:
A reactor (10) defines a chamber (11) in which are disposed an upper electrode (12) and a lower workpiece electrode (13). The upper electrode is connected to a R.F. supply whilst the lower electrode is connected to a stress control unit (14). The stress control unit is used to adjust or maintain the effective resistance of the connection between the workpiece electrode (13) and ground.
摘要:
The present invention provides novel plasma sources useful in the thin film coating arts and methods of using the same. More specifically, the present invention provides novel linear and two dimensional plasma sources that produce linear and two dimensional plasmas, respectively, that are useful for plasma-enhanced chemical vapor deposition. The present invention also provides methods of making thin film coatings and methods of increasing the coating efficiencies of such methods.
摘要:
A method includes: generating a peroxide radical on a dielectric substrate surface by treating the dielectric substrate surface with atmospheric pressure plasma using a rare gas; fixing a functional group forming a coordinate bond with a silver ion, by reacting a grafting agent; and applying a silver-containing composition to the substrate surface, followed by heating and curing the silver-containing composition, to thereby form a silver thin film layer, the silver-containing composition containing a silver compound (A) represented by Formula (1) and an amine compound (B) represented by Formula (2), the silver compound (A) being contained in an amount of 10 to 50% by mass, the amine compound (B) being contained in an amount of 50 to 90% by mass, relative to a total amount of 100% by mass of the silver compound (A) and the amine compound (B). The method enables to form a metal film having high adhesiveness even on the surface of a fluorine resin, which is suitable as a dielectric substrate due to its property of avoidance of delay in signal transmission speed or increase in power consumption, but has extremely low adhesiveness. [C. 1]
(R 1 : a hydrogen atom, -(CY 2 )a-CH a , or -((CH 2 )b-O-CHZ)c-CH 3 ; R 2 : -(CY 2 )d-CH 3 or -((CH 2 )e-O-CHZ)f-CH 3 ; Y: a hydrogen atom or -(CH 2 )g-CH 3 ; Z: a hydrogen atom or -(CH 2 )h-CH 3 ; a: an integer of 0 to 8; b: an integer of 1 to 4; c: an integer of 1 to 3; d: an integer of 1 to 8; e: an integer of 1 to 4; f: an integer of 1 to 3; g: an integer of 1 to 3; h: an integer of 1 or 2)
摘要:
The present invention provides novel plasma sources useful in the thin film coating arts and methods of using the same. More specifically, the present invention provides novel linear and two dimensional plasma sources that produce linear and two dimensional plasmas, respectively, that are useful for plasma-enhanced chemical vapor deposition. The present invention also provides methods of making thin film coatings and methods of increasing the coating efficiencies of such methods.
摘要:
A method includes: generating a peroxide radical on a dielectric substrate surface by treating the dielectric substrate surface with atmospheric pressure plasma using a rare gas; fixing a functional group forming a coordinate bond with a silver ion, by reacting a grafting agent; and applying a silver-containing composition to the substrate surface, followed by heating and curing the silver-containing composition, to thereby form a silver thin film layer, the silver-containing composition containing a silver compound (A) represented by Formula (1) and an amine compound (B) represented by Formula (2), the silver compound (A) being contained in an amount of 10 to 50% by mass, the amine compound (B) being contained in an amount of 50 to 90% by mass, relative to a total amount of 100% by mass of the silver compound (A) and the amine compound (B). The method enables to form a metal film having high adhesiveness even on the surface of a fluorine resin, which is suitable as a dielectric substrate due to its property of avoidance of delay in signal transmission speed or increase in power consumption, but has extremely low adhesiveness. [C. 1] (R 1 : a hydrogen atom, -(CY 2 )a-CH a , or -((CH 2 )b-O-CHZ)c-CH 3 ; R 2 : -(CY 2 )d-CH 3 or -((CH 2 )e-O-CHZ)f-CH 3 ; Y: a hydrogen atom or -(CH 2 )g-CH 3 ; Z: a hydrogen atom or -(CH 2 )h-CH 3 ; a: an integer of 0 to 8; b: an integer of 1 to 4; c: an integer of 1 to 3; d: an integer of 1 to 8; e: an integer of 1 to 4; f: an integer of 1 to 3; g: an integer of 1 to 3; h: an integer of 1 or 2)
摘要:
In order to provide an adhesion preventing plate for a vacuum film formation apparatus, the adhesion preventing plate being capable of suppressing the peel-off of an adhered film to an extremely low level regardless of a protection target member, the adhesion preventing plate is arranged so that the area of contact with the protection target member is reduced and a part other than the contact surface is thermally insulated.
摘要:
The present invention provides novel plasma sources useful in the thin film coating arts and methods of using the same. More specifically, the present invention provides novel linear and two dimensional plasma sources that produce linear and two dimensional plasmas, respectively, that are useful for plasma-enhanced chemical vapor deposition. The present invention also provides methods of making thin film coatings and methods of increasing the coating efficiencies of such methods.
摘要:
A reactor (10) defines a chamber (11) in which are disposed an upper electrode (12) and a lower workpiece electrode (13). The upper electrode is connected to a R.F. supply whilst the lower electrode is connected to a stress control unit (14). The stress control unit is used to adjust or maintain the effective resistance of the connection between the workpiece electrode (13) and ground.