公开(公告)号：EP3469114A1

公开(公告)日：2019-04-17

申请号：EP17730115.7

申请日：2017-06-08

申请人： Element Six Technologies Limited

发明人： TWITCHEN, Daniel

IPC分类号： C23C16/27 ,  H01L21/02 ,  H01L23/373

公开(公告)号：EP2965131A1

公开(公告)日：2016-01-13

申请号：EP14708018.8

申请日：2014-03-04

申请人： Element Six Technologies Limited

发明人： TWITCHEN, Daniel ,  BENNETT, Andrew Michael ,  ANOIKIN, Yevgeny Vasilievich ,  DE WIT, Hendrikus Gerardus Maria

IPC分类号： G02B1/11 ,  G02B1/02

CPC分类号： G02B1/02 ,  G02B1/118

摘要： An optical element comprising: synthetic diamond material; and an anti-reflective surface pattern formed directly in at least one surface of the synthetic diamond material, wherein the optical element has an absorption coefficient measured at room temperature of ≤ 0.5 cm
-1 at a wavelength of 10.6 µm, wherein the optical element has a reflectance at said at least one surface of no more than 2% at an operating wavelength of the optical element, and wherein the optical element has a laser induced damage threshold meeting one or both of the following characteristics: the laser induced damage threshold is at least 30 Jcm
-2 measured using a pulsed laser at a wavelength of 10.6 µm with a pulse duration of 100 ns and a pulse repetition frequency in a range 1 to 10 Hz; and the laser induced damage threshold is at least 1 MW/cm
2 measured using a continuous wave laser at a wavelength of 10.6 µm.

公开(公告)号：EP3071728B1

公开(公告)日：2019-07-03

申请号：EP14799468.5

申请日：2014-11-18

申请人： Element Six Technologies Limited

发明人： KHAN, Rizwan ,  COE, Steven ,  WILMAN, Jonathan ,  TWITCHEN, Daniel ,  SCARSBROOK, Geoffrey ,  BRANDON, John ,  WORT, Christopher ,  MARKHAM, Matthew ,  FRIEL, Ian ,  ROBERTSON, Katharine

IPC分类号： C23C16/27 ,  C23C16/511 ,  C30B29/04 ,  C30B25/10

公开(公告)号：EP3071728A1

公开(公告)日：2016-09-28

申请号：EP14799468.5

申请日：2014-11-18

申请人： Element Six Technologies Limited

发明人： KHAN, Rizwan ,  COE, Steven ,  WILMAN, Jonathan ,  TWITCHEN, Daniel ,  SCARSBROOK, Geoffrey ,  BRANDON, John ,  WORT, Christopher ,  MARKHAM, Matthew ,  FRIEL, Ian ,  ROBERTSON, Katharine

IPC分类号： C23C16/27 ,  C30B25/10 ,  C30B29/04

CPC分类号： C30B25/105 ,  C23C16/274 ,  C23C16/511 ,  C30B29/04

摘要： A method of fabricating synthetic diamond material using a microwave plasma activated chemical vapour deposition technique is provided which utilizes high and uniform microwave power densities applied over large areas and for extended periods of time. Products fabricated using such a synthesis technique are described including a single crystal CVD diamond layer which has a large area and a low nitrogen concentration, and a high purity, fast growth rate single crystal CVD diamond material.

摘要翻译： 提供了一种使用微波等离子体活化化学气相沉积技术制造的合成金刚石材料的方法，它利用应用超大面积和高均匀的微波功率密度和延长的时间段。 产品采用寻求合成技术中描述了包括单晶CVD金刚石层，其具有大面积和低的氮浓度，和高纯度，几乎单晶生长速率CVD金刚石材料制成。

公开(公告)号：EP3155460A1

公开(公告)日：2017-04-19

申请号：EP15727675.9

申请日：2015-06-10

申请人： Element Six Technologies Limited

发明人： MUHR, Alexander ,  ANOIKIN, Yevgeny Vasilievich ,  TWITCHEN, Daniel

IPC分类号： G02B1/02 ,  G02B1/118

CPC分类号： G02B1/118 ,  G02B1/02 ,  G02B5/3083

摘要： An optical element 10 having a synthetic diamond material 16, where an optical surface pattern (6, fig 1) is formed directly in at least one surface of the synthetic diamond material. The pattern has a plurality of projections (fig 7) separated by trenches (fig 7), where the projections are spaced apart with a periodicity in the range between 65% and 99% of a zeroeth order diffraction limit above which non zeroeth diffraction orders are observed at an operating wavelength. The optical surface pattern has a fill fraction in a range 0.1 to 0.6, where the fill fraction is defined as [area of projection in one periodic unit]/[area of the periodic unit]. The optical element an absorption coefficient measured at room temperature of ≤0.2 cm-1 at a wavelength of 10.6 µm

摘要翻译： 具有合成金刚石材料16的光学元件10，其中光学表面图案（图1中的6）直接形成在合成金刚石材料的至少一个表面中。 该图案具有由沟槽（图7）分开的多个突起（图7），其中突出部分间隔在零级衍射极限的65％至99％之间的范围内，其中非零衍射级为 在工作波长下观察。 光学表面图案具有0.1至0.6范围内的填充部分，其中填充部分被定义为[以一个周期单位投影的面积] / [周期单位的面积]。 光学元件在室温下测得的波长为10.6μm的吸收系数为0.2cm -1

公开(公告)号：EP3080647A1

公开(公告)日：2016-10-19

申请号：EP14806295.3

申请日：2014-12-04

申请人： Element Six Technologies Limited

发明人： DODSON, Joseph ,  ANOIKIN, Yevgeny Vasilievich ,  TWITCHEN, Daniel ,  MCCLYMONT, Mark Robin

IPC分类号： G02B5/08

CPC分类号： G02B5/0858 ,  G02B1/02 ,  G02B5/0891

摘要： A mirror for use in high power optical applications, the mirror comprising: a support plate comprising a synthetic diamond material; and a reflective coating disposed over the support plate, wherein the reflective coating comprises a bonding layer of carbide forming material which bonds the reflective coating to the synthetic diamond material in the support plate, a reflective metal layer disposed over the bonding layer, and one or more layers of dielectric material disposed over the reflective metal layer, wherein the bonding layer and the reflective metal layer together have a total thickness in a range 50 nm to 10 μm with the reflective metal layer having a thickness of no more than 5 μm, and wherein the support plate and the reflective coating are configured such that the mirror has a reflectivity of at least 99% at an operational wavelength of the mirror.

公开(公告)号：EP3071736A1

公开(公告)日：2016-09-28

申请号：EP14799170.7

申请日：2014-11-18

申请人： Element Six Technologies Limited

发明人： MARKHAM, Matthew ,  STACEY, Alastair ,  TWITCHEN, Daniel

IPC分类号： C30B25/18 ,  B82Y10/00 ,  C30B25/20 ,  C30B29/04 ,  C30B31/22

CPC分类号： C30B31/22 ,  C30B25/186 ,  C30B25/20 ,  C30B25/205 ,  C30B29/04 ,  C30B29/68 ,  H01L21/042 ,  H01L29/1602

摘要： A single crystal CVD diamond component comprising: a surface, wherein at least a portion of said surface is formed of as-grown growth face single crystal CVD diamond material which has not been polished or etched and which has a surface roughness R
a of no more than 100 nm; and a layer of NV
- defects, said layer of NV
- defects being disposed within 1 μm of the surface, said layer of NV
- defects having a thickness of no more than 500 nm, and said layer of NV
- defects having a concentration of NV
- defects of at least 10
5 NV
- /cm
2 .

摘要翻译： 1.一种单晶CVD金刚石组件，包括：表面，其中所述表面的至少一部分由未被抛光或蚀刻的生长面单晶CVD金刚石材料形成，并且其表面粗糙度Ra不大于 100 nm; 以及一层NV缺陷，所述NV缺陷层设置在表面的1μm内，所述NV缺陷层具有不大于500nm的厚度，并且所述NV-缺陷层具有浓度为 NV-缺陷至少为105 NV- / cm2。

公开(公告)号：EP2965130A1

公开(公告)日：2016-01-13

申请号：EP14708020.4

申请日：2014-03-04

申请人： Element Six Technologies Limited

发明人： TWITCHEN, Daniel ,  BENNETT, Andrew Michael ,  ANOIKIN, Yevgeny Vasilievich ,  DE WIT, Hendrikus Gerardus Maria

IPC分类号： G02B1/02 ,  G02B5/18 ,  C30B25/02 ,  C30B29/04

CPC分类号： G02B1/02 ,  C30B25/02 ,  C30B29/04 ,  G02B3/04 ,  G02B3/08 ,  G02B5/1876

摘要： An optical element comprising: synthetic diamond material; and a flattened lens surface structure in the form of a zone plate, Fresnel lens, or a spherical lens formed directly in at least one surface of the synthetic diamond material, wherein the synthetic diamond material has an absorption coefficient measured at room temperature of ≦̸0.5 cm−1 at a wavelength of 10.6 μm, and wherein the synthetic diamond material has a laser induced damage threshold meeting one or both of the following characteristics: the laser induced damage threshold is at least 30 Jcm−2 measured using a pulsed laser at a wavelength of 10.6 μm with a pulse duration of 100 ns and a pulse repetition frequency in a range 1 to 10 Hz; and the laser induced damage threshold is at least 1 MW/cm2 measured using a continuous wave laser at a wavelength of 10.6 μm.

摘要翻译： 一种光学元件，包括：合成金刚石材料; 以及直接形成在人造金刚石材料的至少一个表面上的波带片，菲涅耳透镜或球面透镜形式的平坦透镜表面结构，其中人造金刚石材料具有在室温下测得的吸收系数≤0.5 cm -1，并且其中人造金刚石材料具有满足以下特征中的一个或两个的激光诱导损伤阈值：激光诱导损伤阈值为至少30Jcm -2，其使用脉冲激光在 波长10.6μm，脉冲持续时间100ns，脉冲重复频率1〜10Hz; 并且使用连续波激光器在10.6μm的波长处测量的激光诱导损伤阈值为至少1MW / cm 2。