公开(公告)号：EP2838107B1

公开(公告)日：2016-06-01

申请号：EP14180858.4

申请日：2014-08-13

申请人： FEI COMPANY

发明人： Barends, Paul ,  Van den Boogaard, Ron ,  Brundage, Philip

IPC分类号： H01J37/20 ,  G01R31/28 ,  H01J37/305

CPC分类号： G01R1/06705 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/24564 ,  H01J2237/24592

公开(公告)号：EP1883095A1

公开(公告)日：2008-01-30

申请号：EP06117867.9

申请日：2006-07-26

申请人： FEI COMPANY

发明人： Van Gaasbeek, Erik ,  Dona, Pleun ,  Van de Water, Gerbert ,  Van den Oetelaar, Johannes ,  Barends, Paul ,  Van Hees, Ian

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01J37/20

摘要： The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder ( 10 ) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

摘要翻译： 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。

公开(公告)号：EP2838107A1

公开(公告)日：2015-02-18

申请号：EP14180858.4

申请日：2014-08-13

申请人： FEI COMPANY

发明人： Barends, Paul ,  Van den Boogaard, Ron ,  Brundage, Philip

IPC分类号： H01J37/20 ,  G01R31/28 ,  H01J37/305

CPC分类号： G01R1/06705 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/24564 ,  H01J2237/24592

摘要： A probe assembly can be selectively connected and disconnected from its electrical harness within a vacuum chamber by motion of a stage supporting the probe assembly, so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.

摘要翻译： 通过支撑探针组件的台架的运动，可以在真空室内选择性地将探针组件与其电线断开连接，从而安装有工件的探针组件可以在不受电缆干扰的情况下旋转和倾斜，并且可以 然后重新连接而不打开真空室。 还描述了当探针组件与其电气线束断开连接时，将样品和探针接地的手段，以及通过确保探头机构和探头本身在操作过程中不会粘住太远的手段来防止探头机构和探头本身的损坏。

公开(公告)号：EP1883096A1

公开(公告)日：2008-01-30

申请号：EP07112812.8

申请日：2007-07-20

申请人： FEI COMPANY

发明人： Van Gaasbeek, Erik ,  Dona, Pleun ,  Barends, Paul ,  Van Hees, Ian ,  Van de Water, Jeroen ,  Van den Oetelaar, Johannes

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01J37/20

摘要： The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder (10) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

摘要翻译： 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。