公开(公告)号：EP1883095A1

公开(公告)日：2008-01-30

申请号：EP06117867.9

申请日：2006-07-26

申请人： FEI COMPANY

发明人： Van Gaasbeek, Erik ,  Dona, Pleun ,  Van de Water, Gerbert ,  Van den Oetelaar, Johannes ,  Barends, Paul ,  Van Hees, Ian

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01J37/20

摘要： The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder ( 10 ) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

摘要翻译： 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。

公开(公告)号：EP1852888A1

公开(公告)日：2007-11-07

申请号：EP06113337.7

申请日：2006-05-01

申请人： FEI COMPANY

发明人： Van de Water, Gerbert ,  Hoeks, Petrus

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/2001

摘要： The invention relates to a thermal switch for particle-optical apparatus. In, for example, a cryo-TEM (transmission electron microscope), a sample 34 that is placed at an extremity 20 of a sample holder 7 can be maintained at, for example, the temperature of liquid nitrogen. There is a need to be able to inspect a sample at, for example, room temperature in a simple manner, without heating the microscope as a whole from the cryogenic temperature to room temperature. By using the thermal switch 40, this becomes possible. To this end, the thermal switch changes the thermal path between a cold source 22 in the apparatus and the extremity 20 of the sample holder 7, whereby, in one position, position 46 a , a connection is made from the extremity 20 to the cold source 22, and, in the other position, position 46 b , a connection is made to a portion 44 of the apparatus that is maintained at room temperature.

摘要翻译： 本发明涉及一种用于粒子光学装置的热开关。 例如，在冷冻TEM（透射电子显微镜）中，放置在样品保持器7的末端20的样品34可以保持在例如液氮的温度。 需要能够以简单的方式在例如室温下检查样品，而不将显微镜作为整体从低温到室温加热。 通过使用热敏开关40，这成为可能。 为此，热开关改变设备中的冷源22和样品架7的末端20之间的热路径，由此在一个位置中位置46a，从末端20到冷的连接 源22，并且在另一位置，位置46b，连接到维持在室温的设备的部分44。