公开(公告)号：EP1883095A1

公开(公告)日：2008-01-30

申请号：EP06117867.9

申请日：2006-07-26

申请人： FEI COMPANY

发明人： Van Gaasbeek, Erik ,  Dona, Pleun ,  Van de Water, Gerbert ,  Van den Oetelaar, Johannes ,  Barends, Paul ,  Van Hees, Ian

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01J37/20

摘要： The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder ( 10 ) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

摘要翻译： 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。

公开(公告)号：EP1883096A1

公开(公告)日：2008-01-30

申请号：EP07112812.8

申请日：2007-07-20

申请人： FEI COMPANY

发明人： Van Gaasbeek, Erik ,  Dona, Pleun ,  Barends, Paul ,  Van Hees, Ian ,  Van de Water, Jeroen ,  Van den Oetelaar, Johannes

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01J37/20

摘要： The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder (10) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

摘要翻译： 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。