公开(公告)号：EP2533278A2

公开(公告)日：2012-12-12

申请号：EP12171116.2

申请日：2012-06-07

Applicant: FEI COMPANY

Inventor： Warschauer, Reinier ,  Young, Richard ,  Rue, Chad ,  Carleson, Peter

IPC: H01L21/66 ,  H01J37/28 ,  H01J37/304 ,  G01T7/00

CPC classification number: H01L22/12 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing is described. Preferred embodiments of the present invention can be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan a "strip" of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically "count" the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

公开(公告)号：EP1717841A1

公开(公告)日：2006-11-02

申请号：EP06112148.9

申请日：2006-04-03

Applicant: FEI COMPANY

Inventor： Carleson, Peter

IPC: H01J37/304 ,  G01N23/225

CPC classification number: G01N23/2251 ,  H01J37/304 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/31

Abstract: A method of navigating or endpointing a microscopic structure by subsurface imaging using a beam of electrons having sufficient energy to penetrate the surface and produce a subsurface image. For endpointing, when the subsurface image becomes relatively clear at a known electron energy, a user knows that he is approaching the buried feature. For navigating, a subsurface image can be formed of fiducials or other features to determine the position of the beam on the device.

Abstract translation: 通过使用具有足够能量的电子束穿透表面并产生地下图像的地下成像来导航或终点微观结构的方法。 对于终点，当地下图像在已知的电子能量下变得相对清晰时，用户知道他正在接近埋藏的特征。 为了导航，地下图像可以由基准或其他特征形成，以确定光束在设备上的位置。

公开(公告)号：EP2533278A3

公开(公告)日：2013-03-20

申请号：EP12171116.2

申请日：2012-06-07

Applicant: FEI COMPANY

Inventor： Warschauer, Reinier ,  Young, Richard ,  Rue, Chad ,  Carleson, Peter

IPC: H01L21/66 ,  H01J37/28 ,  H01J37/304 ,  G06T7/00

CPC classification number: H01L22/12 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing is described. Preferred embodiments of the present invention can be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan a "strip" of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically "count" the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

Abstract translation: 描述了半导体芯片制造领域中用于局部导航的高精度光束布置的改进方法。 本发明的优选实施例可用于快速导航到存储器阵列或类似结构中的一个单个位单元，例如用于表征或校正该单独位单元中的缺陷。 使用高分辨率扫描来扫描阵列的一个边缘（沿X轴和Y轴）的单元格的“条带”，以便定位包含所需单元格的行，然后沿着沿着该方向的类似高速扫描 （在剩余方向上），直到达到所需的单元格位置。 这允许使用模式识别工具来自动“计数”导航到所需单元格所需的单元格，而不需要大量的时间来对整个阵列进行成像。