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    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device
    2.
    发明公开
    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device 有权
    定序器用于自动在带电粒子射线装置的组合和支持的任务手册

    公开(公告)号：EP2693457A2

    公开(公告)日：2014-02-05

    申请号：EP13176584.4

    申请日：2013-07-16

    Applicant: FEI COMPANY

    Inventor： Young, Richard ,  Tanner, Ryan ,  Warschauer, Reinier

    IPC: H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/31749

    Abstract: A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.

    Abstract translation: 一种用于成像和处理通过使用至少一个带电粒子束的具有纳米级特征的工件的装置，由这两个完全自动化的程序和手动协助程序。 该装置包括一个用户接口，包括日程输入输入装置和人类操作者准备好输入确实可在第一状态或第二状态和程序调度器放置，接受的步骤的时间表，包括全自动化程序和手动协助程序 从时间表输入进入装置。 此外，一个程序定序器，当操作人员就绪输入处于所述第二状态时，通过完全自动化的程序序列，直到操作人员准备输入被置于第一状态时，在WhichTime定序开始测序手动辅助程序，后 深远的完全自动化的过程在安全终止点执行。

    High accuracy beam placement for local area navigation
    3.
    发明公开
    High accuracy beam placement for local area navigation 审中-公开
    HochpräziseStrahlplatzierung zur导航在lokalen Bereichen

    公开(公告)号：EP2533278A3

    公开(公告)日：2013-03-20

    申请号：EP12171116.2

    申请日：2012-06-07

    Applicant: FEI COMPANY

    Inventor： Warschauer, Reinier ,  Young, Richard ,  Rue, Chad ,  Carleson, Peter

    IPC: H01L21/66 ,  H01J37/28 ,  H01J37/304 ,  G06T7/00

    CPC classification number: H01L22/12 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing is described. Preferred embodiments of the present invention can be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan a "strip" of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically "count" the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

    Abstract translation: 描述了半导体芯片制造领域中用于局部导航的高精度光束布置的改进方法。 本发明的优选实施例可用于快速导航到存储器阵列或类似结构中的一个单个位单元，例如用于表征或校正该单独位单元中的缺陷。 使用高分辨率扫描来扫描阵列的一个边缘（沿X轴和Y轴）的单元格的“条带”，以便定位包含所需单元格的行，然后沿着沿着该方向的类似高速扫描 （在剩余方向上），直到达到所需的单元格位置。 这允许使用模式识别工具来自动“计数”导航到所需单元格所需的单元格，而不需要大量的时间来对整个阵列进行成像。

    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device
    6.
    发明公开
    Sequencer for combining automated and manual-assistance jobs in a charged particle beam device 有权
    定序器用于自动在带电粒子射线装置的组合和支持的任务手册

    公开(公告)号：EP2693457A3

    公开(公告)日：2015-01-28

    申请号：EP13176584.4

    申请日：2013-07-16

    Applicant: FEI COMPANY

    Inventor： Young, Richard ,  Tanner, Ryan ,  Warschauer, Reinier

    IPC: H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/31749

    Abstract: A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.

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