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    Method of calibrating a scanning transmission charged-particle microscope
    4.
    发明公开
    Method of calibrating a scanning transmission charged-particle microscope 有权
    Verfahren zur Kalibrierung eines Transmissions-Rasterelektronenmikroskops

    公开(公告)号：EP2966668A1

    公开(公告)日：2016-01-13

    申请号：EP14176529.7

    申请日：2014-07-10

    Applicant: FEI COMPANY

    Inventor： Otten, Max ,  Kok, Els ,  Verheijen, Martin

    IPC: H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2817 ,  H01J2237/2826

    Abstract: A method of calibrating a Scanning Transmission Charged-Particle Microscope comprising:
    - A specimen holder, for holding a specimen;
    - A source, for producing a beam of charged particles;
    - An illuminator, for directing said beam so as to irradiate the specimen;
    - An imaging system, for directing charged particles that traverse the specimen onto a detector;
    - Scanning means, for causing said beam to undergo scanning motion relative to a surface of the specimen,

    which microscope can be operated in:
    - A non-scanning mode, whereby said beam is relatively broad and said detector forms an image without invocation of said scanning means; or
    - A scanning mode, whereby said beam is relatively narrow and said detector accumulates an image as a function of scan position of said beam,

    which method comprises the following steps:
    - Providing a calibration specimen on said specimen holder;
    - In non-scanning mode, using said detector to form a calibration image of the calibration specimen, using a given configuration of said imaging system;
    - Utilizing a known dimension of said calibration specimen and comparing it to a corresponding dimension in said calibration image to calibrate a characteristic dimension of a field of view of said detector;
    - In scanning mode, recording a beam pattern of said beam in the calibrated field of view of said detector, and examining the recorded beam pattern to derive a geometric aspect thereof.

    Abstract translation: 一种校准扫描透射带电粒子显微镜的方法，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 成像系统，用于将穿过样本的带电粒子引导到检测器上; - 扫描装置，用于使所述光束相对于所述样本的表面经历扫描运动，所述显微镜可以在以下操作中： - 非扫描模式，由此所述光束相对较宽，并且所述检测器形成图像而不调用所述 扫描手段; 或 - 扫描模式，由此所述光束相对较窄，并且所述检测器根据所述光束的扫描位置累积图像，该方法包括以下步骤： - 在所述样本保持器上提供校准样本; - 在非扫描模式中，使用所述检测器来形成校准样本的校准图像，使用所述成像系统的给定配置; - 利用所述校准样本的已知尺寸并将其与所述校准图像中的对应尺寸进行比较，以校准所述检测器的视野的特征尺寸; - 在扫描模式中，在所述检测器的校准视场中记录所述光束的光束图案，并且检查所记录的光束图案以导出其几何方面。

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