公开(公告)号：EP2509098A1

公开(公告)日：2012-10-10

申请号：EP12163264.0

申请日：2012-04-05

Applicant: FEI COMPANY

Inventor： Otten, Max ,  Van Hoften, Gerald ,  Lof, Joeri

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/302

CPC classification number: H01J37/26 ,  H01J37/244 ,  H01J37/302 ,  H01J2237/0203 ,  H01J2237/043 ,  H01J2237/065 ,  H01J2237/22 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24507 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/2802

Abstract: The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters, such as changes to the excitation of condenser lenses (104), projector lenses (106) and/or beam energy. The prediction is made using an optical model or a Look-Up-Table. When the predicted exposure of the detector is less than a predetermined value, the desired changes are made, otherwise a warning message is generated and changes to the settings are postponed.

Abstract translation: 本发明涉及一种保护TEM中的直接电子探测器（151）的方法。 本发明涉及在设置新的光束参数（例如聚光透镜（104），投影透镜（106）的激励和/或光束能量的改变）之前预测检测器上的电流密度。 预测是使用光学模型或查找表进行的。 当检测器的预测曝光量小于预定值时，进行期望的改变，否则产生警告消息并且延迟对设置的改变。

公开(公告)号：EP2463888A1

公开(公告)日：2012-06-13

申请号：EP10193887.6

申请日：2010-12-07

Applicant: FEI COMPANY

Inventor： Van Hoften, Gerald ,  Stekelenburg, Michael ,  Lof, Joeri ,  Schuurmans, Frank ,  Henderson, Richard ,  McMullan, Gregory ,  Faruqi, Abdul ,  Turcheta, Renato ,  Guerrini, Nicola

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/22

CPC classification number: H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2447 ,  H01J2237/24578 ,  H01J2237/26 ,  H01J2237/2802

Abstract: In a direct electron detector, backscattering of electrons into the detector volume from below the sensor is prevented. In some embodiments, an empty space is maintained below the sensor. In other embodiments, a structure below the sensor includes geometry, such as multiple high aspects ratio channels, either extending to or from the sensor to trap electrons, or a structure of angled surfaces to deflect the electrons that pass through the sensor.

Abstract translation: 在直接电子检测器中，防止从传感器下方将电子反向散射到检测器体积中。 在一些实施例中，在传感器下方保持空的空间。 在其他实施例中，传感器下方的结构包括几何形状，例如多个高方面比例的通道，或者延伸到传感器或从传感器捕获电子，或倾斜表面的结构以偏转通过传感器的电子。

公开(公告)号：EP2509098B1

公开(公告)日：2013-10-02

申请号：EP12163264.0

申请日：2012-04-05

Applicant: FEI COMPANY

Inventor： Otten, Max ,  Van Hoften, Gerald ,  Lof, Joeri

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/302

CPC classification number: H01J37/26 ,  H01J37/244 ,  H01J37/302 ,  H01J2237/0203 ,  H01J2237/043 ,  H01J2237/065 ,  H01J2237/22 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24507 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/2802

公开(公告)号：EP2463888B1

公开(公告)日：2013-02-13

申请号：EP10193887.6

申请日：2010-12-07

Applicant: FEI COMPANY

Inventor： Van Hoften, Gerald ,  Stekelenburg, Michael ,  Lof, Joeri ,  Schuurmans, Frank ,  Henderson, Richard ,  McMullan, Gregory ,  Faruqi, Abdul ,  Turcheta, Renato ,  Guerrini, Nicola

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/22

CPC classification number: H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2447 ,  H01J2237/24578 ,  H01J2237/26 ,  H01J2237/2802

公开(公告)号：EP2509097A1

公开(公告)日：2012-10-10

申请号：EP11161427.7

申请日：2011-04-07

Applicant: FEI Company

Inventor： Otten, Max ,  Van Hoften, Gerald ,  Lof, Joeri

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/302

CPC classification number: H01J37/26 ,  H01J37/244 ,  H01J37/302 ,  H01J2237/0203 ,  H01J2237/043 ,  H01J2237/065 ,  H01J2237/22 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24507 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/2802

Abstract: The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters, such as changes to the excitation of condenser lenses (104), projector lenses (106) and/or beam energy. The prediction is made using an optical model or a Look-Up-Table. When the predicted exposure of the detector is less than a predetermined value, the desired changes are made, otherwise a warning message is generated and changes to the settings are postponed.