公开(公告)号：EP3790036A2

公开(公告)日：2021-03-10

申请号：EP20194019.4

申请日：2020-09-02

申请人： FEI Company

发明人： Hendriksen, Bas ,  Kuijper, Maarten ,  Mele, Luigi ,  Dona, Pleun ,  Raja, Erum ,  Aminian, Atieh

IPC分类号： H01J37/20 ,  G01N1/42 ,  G01N23/04 ,  G01N23/2204 ,  G01N23/2251

摘要： A sample inspection device 200 includes at least a chamber 231 formed between a top electron transparent layer 217 and a bottom electron transparent layer 218 for holding a sample. Multiple pillars 212 are arranged within the chamber. The sample inspection device includes a window 201 covering at least one of the multiple pillars 212.
Various methods and devices are provided for searching the optimum sample condition of a sample for cryogenic electron microscopy. Multiple samples with different sample conditions may be screened using a sample inspection device having an additional, second, chamber formed between the top electron transparent layer and the bottom electron transparent layer.