公开(公告)号：EP2648207A1

公开(公告)日：2013-10-09

申请号：EP13153164.2

申请日：2013-01-30

申请人： FEI Company

发明人： Boughorbel, Faysal ,  Bosch, Eric ,  Potocek, Pavel ,  Zhuge, Xiaodong ,  Lich, Berend

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： A method of examining a sample using a charged-particle microscope (400), comprising the following steps:
- Mounting the sample (410) on a sample holder (408);
- Using a particle-optical column (402) to direct at least one beam (404) of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample;
- Using a detector arrangement (100, 420) to detect at least a portion of said emitted radiation, which method comprises the following steps:
- Embodying the detector arrangement to detect electrons in the emitted radiation;
- Recording an output On of said detector arrangement as a function of kinetic energy E n of said electrons, thus compiling a measurement set M = {(O n , E n )} for a plurality of values of E n ;
- Using computer processing apparatus (424) to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S,
whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

摘要翻译： 一种使用带电粒子显微镜（400）检查样品的方法，包括以下步骤： - 将样品（410）安装在样品架（408）上; - 使用粒子光学镜筒（402）将至少一个微粒辐射束（404）引导到样品的表面S上，从而产生引起发射的辐射从样品发出的相互作用; - 使用检测器装置（100,420）来检测所述发射的辐射的至少一部分，该方法包括以下步骤： - 实施检测器装置以检测所发射的辐射中的电子; - 记录作为所述电子的动能En的函数的所述检测器装置的输出On，从而为En的多个值编制测量集合M = {（On，En）}; - 使用计算机处理设备（424）自动解卷积测量集合M并将其空间解析为结果集合R = {（Vk，Lk）}，其中空间变量V在相关联的离散深度水平Lk处展示值Vk 参考表面S，其中n和k是整数序列的成员，并且空间变量V表示作为其体积中的位置的函数的样品的物理性质。

公开(公告)号：EP2648208A3

公开(公告)日：2016-03-23

申请号：EP13162238.3

申请日：2013-04-04

申请人： FEI COMPANY

发明人： Boughorbel, Faysal ,  Bosch, Eric ,  Potocek, Pavel ,  Zhuge, Xiaodong ,  Lich, Ben

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/226

摘要： A method of examining a sample using a charged-particle microscope (400), comprising the following steps:
- Mounting the sample (410) on a sample holder (408);
- Using a particle-optical column (402) to direct at least one beam (404) of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample;
- Using a detector arrangement (100, 420) to detect at least a portion of said emitted radiation, which method comprises the following steps:
- Embodying the detector arrangement to detect electrons in the emitted radiation;
- Recording an output On of said detector arrangement as a function of kinetic energy E n of said electrons, thus compiling a measurement set M = {(O n , E n )} for a plurality of values of E n ;
- Using computer processing apparatus (424) to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S,
whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

公开(公告)号：EP2648208B1

公开(公告)日：2017-08-09

申请号：EP13162238.3

申请日：2013-04-04

申请人： FEI COMPANY

发明人： Boughorbel, Faysal ,  Bosch, Eric ,  Potocek, Pavel ,  Zhuge, Xiaodong ,  Lich, Ben

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/226

公开(公告)号：EP2648208A2

公开(公告)日：2013-10-09

申请号：EP13162238.3

申请日：2013-04-04

申请人： FEI COMPANY

发明人： Boughorbel, Faysal ,  Bosch, Eric ,  Potocek, Pavel ,  Zhuge, Xiaodong ,  Lich, Ben

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/226

摘要： A method of examining a sample using a charged-particle microscope (400), comprising the following steps:
- Mounting the sample (410) on a sample holder (408);
- Using a particle-optical column (402) to direct at least one beam (404) of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample;
- Using a detector arrangement (100, 420) to detect at least a portion of said emitted radiation, which method comprises the following steps:
- Embodying the detector arrangement to detect electrons in the emitted radiation;
- Recording an output On of said detector arrangement as a function of kinetic energy E n of said electrons, thus compiling a measurement set M = {(O n , E n )} for a plurality of values of E n ;
- Using computer processing apparatus (424) to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S,
whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

摘要翻译： 一种使用带电粒子显微镜（400）检查样品的方法，包括以下步骤： - 将样品（410）安装在样品架（408）上; - 使用粒子光学柱（402）将至少一个粒子辐射束（404）引导到样品的表面S上，从而产生引起发射的辐射从样品发出的相互作用; - 使用检测器装置（100,420）来检测所述发射的辐射的至少一部分，该方法包括以下步骤： - 实现检测器装置以检测所发射的辐射中的电子; 记录所述检测器装置的输出On作为所述电子的动能E n的函数，从而针对多个E n值编制测量集M = {（O n，E n）}; - 使用计算机处理设备（424）自动地去卷积测量集M并将其空间解析为结果集R = {（V k，L k）}，其中空间变量V表示相关离散的值V k 深度级L k参考表面S，由此n和k是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。