公开(公告)号：EP3806131A3

公开(公告)日：2021-06-23

申请号：EP20200687.0

申请日：2020-10-08

申请人： FEI Company

发明人： Geurts, Remco Johannes Petrus ,  Potocek, Pavel ,  Peemen, Maurice ,  Machek, Ondrej

IPC分类号： H01J37/22 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

摘要： Methods and systems for creating TEM lamella using image restoration algorithms for low keV FIB images are disclosed. An example method includes irradiating a sample with an ion beam at low keV settings, generating (308) a low keV ion beam image of the sample based on emissions resultant from irradiation by the ion beam, and then applying (310) an image restoration model to the low keV ion beam image of the sample to generate a restored image. The sample is then localized (312) within the restored image, and a low keV milling of the sample is performed (316) with the ion beam based on the localized sample within the restored image.

公开(公告)号：EP2963673B1

公开(公告)日：2019-11-13

申请号：EP15174190.7

申请日：2015-06-29

申请人： FEI Company

发明人： Potocek, Pavel ,  Boughorbel, Faysal ,  Lich, Ben ,  Langhorst, Matthias

IPC分类号： H01J37/22 ,  H01J37/28 ,  G02B21/00

公开(公告)号：EP2735866A1

公开(公告)日：2014-05-28

申请号：EP12194321.1

申请日：2012-11-27

申请人： FEI COMPANY

发明人： Potocek, Pavel ,  Bierhoff, Mart ,  Vystavel, Tomás ,  Drybcák, Lukás

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： H04N7/18 ,  G01N23/2251 ,  H01J37/265 ,  H01J37/28

摘要： The invention relates to a method of sampling a sample (202) and displaying obtained information on a display (244), the method comprising:
• Scanning a beam (232) of, for example, electrons, over the sample in a series of N overlapping sub-frames, one sub-frame at a time, each sub-frame comprising M n scan positions, the scan positions of each sub-frame not overlapping with the scan positions of other sub-frames, the beam thereby irradiating the sample at N x M n scan positions, the N x M n scan positions forming the field of view;
• Using a detector (242) detecting a signal emanating from the sample in response to the irradiation of the sample by said beam, for example secondary or backscattered electrons, said signal sampled for each scan positions; and
• Displaying the sub-frames on the display having at least N x M n pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions;
Characterized in that
• In which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and
• In which after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first sub-frame, the second sub-frame, or both sub-frames.
This results in a scanning method that shows a more even charge distribution over the sample, resulting in e.g. less charging effects, while offering a well interpretable image even after the scanning of the first sub-frame.

公开(公告)号：EP2648207A1

公开(公告)日：2013-10-09

申请号：EP13153164.2

申请日：2013-01-30

申请人： FEI Company

发明人： Boughorbel, Faysal ,  Bosch, Eric ,  Potocek, Pavel ,  Zhuge, Xiaodong ,  Lich, Berend

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： A method of examining a sample using a charged-particle microscope (400), comprising the following steps:
- Mounting the sample (410) on a sample holder (408);
- Using a particle-optical column (402) to direct at least one beam (404) of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample;
- Using a detector arrangement (100, 420) to detect at least a portion of said emitted radiation, which method comprises the following steps:
- Embodying the detector arrangement to detect electrons in the emitted radiation;
- Recording an output On of said detector arrangement as a function of kinetic energy E n of said electrons, thus compiling a measurement set M = {(O n , E n )} for a plurality of values of E n ;
- Using computer processing apparatus (424) to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S,
whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

摘要翻译： 一种使用带电粒子显微镜（400）检查样品的方法，包括以下步骤： - 将样品（410）安装在样品架（408）上; - 使用粒子光学镜筒（402）将至少一个微粒辐射束（404）引导到样品的表面S上，从而产生引起发射的辐射从样品发出的相互作用; - 使用检测器装置（100,420）来检测所述发射的辐射的至少一部分，该方法包括以下步骤： - 实施检测器装置以检测所发射的辐射中的电子; - 记录作为所述电子的动能En的函数的所述检测器装置的输出On，从而为En的多个值编制测量集合M = {（On，En）}; - 使用计算机处理设备（424）自动解卷积测量集合M并将其空间解析为结果集合R = {（Vk，Lk）}，其中空间变量V在相关联的离散深度水平Lk处展示值Vk 参考表面S，其中n和k是整数序列的成员，并且空间变量V表示作为其体积中的位置的函数的样品的物理性质。

公开(公告)号：EP3499459A1

公开(公告)日：2019-06-19

申请号：EP17208266.1

申请日：2017-12-18

申请人： FEI Company

发明人： Schoenmakers, Remco ,  Peemen, Maurice ,  Boughorbel, Faysal ,  Potocek, Pavel

IPC分类号： G06T7/174

摘要： The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.

公开(公告)号：EP3104392A1

公开(公告)日：2016-12-14

申请号：EP16172498.4

申请日：2016-06-01

申请人： FEI Company

发明人： Potocek, Pavel ,  Boughorbel, Faysal ,  Van den Boogaard, Ron ,  Korkmaz, Emine

IPC分类号： H01J37/26 ,  G01N1/28 ,  H01J37/304 ,  H01J37/305

CPC分类号： H01J37/3005 ,  G01N1/286 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/304 ,  H01J37/3056 ,  H01J37/317 ,  H01J2237/2067 ,  H01J2237/221 ,  H01J2237/24495

摘要： A method of investigating a specimen using:
- A charged-particle microscope comprising:
▪ A specimen holder, for holding the specimen;
▪ A source, for producing a beam of charged-particle radiation;
▪ An illuminator, for directing said beam so as to irradiate a surface of the specimen;
▪ An imaging detector, for receiving a flux of radiation emanating from the specimen in response to said irradiation, so as to produce an image of at least part of said surface;
- An apparatus that can be invoked to modify said surface by performing thereon a process chosen from the group comprising material removal, material deposition, and combinations hereof,
which method comprises the following steps:
- Producing and storing a first image, of a first, initial surface of the specimen;
- In a primary modification step, invoking said apparatus so as to modify said first surface, thereby yielding a second, modified surface;
- Producing and storing a second image, of said second surface;
- Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

摘要翻译： 一种使用以下方法研究样本的方法： - 带电粒子显微镜，包括：▪样本架，用于容纳样本; ▪产生一束带电粒子辐射的来源; ▪照射器，用于引导所述光束以照射样本的表面; ▪成像检测器，用于接收响应于所述照射而从样本发出的辐射通量，以便产生至少部分所述表面的图像; - 可以通过在其上执行从包括材料去除，材料沉积及其组合的组中选择的工艺来调用所述表面的装置，所述方法包括以下步骤： - 生成并存储第一图像， 试样的初始表面; - 在主修改步骤中，调用所述设备以修改所述第一表面，由此产生第二修改表面; - 产生并存储所述第二表面的第二图像; - 使用数学图像相似度量来执行所述第二图像和第一图像的像素方式比较，以便生成所述主要修改步骤的主要品质因数。

公开(公告)号：EP3104155A1

公开(公告)日：2016-12-14

申请号：EP15171227.0

申请日：2015-06-09

申请人： FEI Company

发明人： Potocek, Pavel ,  Boughorbel, Faysal ,  Van den Boogaard, Ron ,  Korkmaz, Emine

IPC分类号： G01N1/28 ,  H01J37/26 ,  H01J37/304 ,  H01J37/305

CPC分类号： H01J37/3005 ,  G01N1/286 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/304 ,  H01J37/3056 ,  H01J37/317 ,  H01J2237/2067 ,  H01J2237/221 ,  H01J2237/24495

摘要： A method of investigating a specimen using:
- A charged-particle microscope comprising:
▪ A specimen holder, for holding the specimen;
▪ A source, for producing a beam of charged-particle radiation;
▪ An illuminator, for directing said beam so as to irradiate a surface of the specimen;
▪ An imaging detector, for receiving a flux of radiation emanating from the specimen in response to said irradiation, so as to produce an image of at least part of said surface;

- An apparatus that can be invoked to modify said surface by performing thereon a process chosen from the group comprising material removal, material deposition, and combinations hereof,

which method comprises the following steps:
- Producing and storing a first image, of a first, initial surface of the specimen;
- In a primary modification step, invoking said apparatus so as to modify said first surface, thereby yielding a second, modified surface;
- Producing and storing a second image, of said second surface;
- Using a mathematical Image Similarity Metric to compare said second and first images, so as to generate a primary figure of merit for said primary modification step.

摘要翻译： 一种使用以下方法研究试样的方法： - 带电粒子显微镜，其包括： - 用于保持所述试样的试样保持器; - 一种用于产生带电粒子辐射束的来源; - 一种照明器，用于引导所述光束以照射所述样本的表面; - 一种成像检测器，用于响应于所述照射从所述样本接收辐射通量，以产生所述表面的至少一部分的图像; - 可以通过在其上执行从包括材料去除，材料沉积及其组合的组中选择的工艺来调用所述表面来修饰所述表面的装置，所述方法包括以下步骤： - 制造和存储第一图像， 样品的初始表面; - 在一次修改步骤中，调用所述装置以便修改所述第一表面，从而产生第二修改表面; - 生成和存储所述第二表面的第二图像; - 使用数学图像相似性度量来比较所述第二和第一图像，以便产生用于所述主要修改步骤的主要品质因数。

公开(公告)号：EP2963672A1

公开(公告)日：2016-01-06

申请号：EP14174903.6

申请日：2014-06-30

申请人： FEI Company

发明人： Potocek, Pavel ,  Boughorbel, Faysal ,  Lich, Ben ,  Langhorst, Matthias

IPC分类号： H01J37/22 ,  H01J37/28 ,  G02B21/00

CPC分类号： H01J37/244 ,  G02B21/002 ,  G02B21/008 ,  H01J37/222 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/226

摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Directing a beam of radiation from a source through an illuminator so as to irradiate a surface S of the specimen;
- Using a detector to detect a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to follow a scan path relative to said surface;
- For each of a set of sample points in said scan path, recording an output D n of the detector as a function of a value P n of a selected measurement parameter P, thus compiling a measurement set M = {(D n , P n )}, where n is a member of an integer sequence;
- Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R representing depth-resolved imagery of the specimen,

whereby, considered at a given point p i within the specimen, the method comprises the following steps:
- In a first probing session, employing a first beam configuration B 1 to irradiate the point p i with an associated first Point Spread Function F 1 , whereby said beam configuration is different to said measurement parameter;
- In at least a second probing session, employing a second beam configuration B 2 to irradiate the point p i with an associated second Point Spread Function F 2 , whereby F 2 overlaps partially with F 1 in a common overlap zone O i in which point p i is located;
- Using an Independent Component Analysis algorithm in said computer processing apparatus to perform spatial resolution in said overlap zone O i .

摘要翻译： 使用扫描式显微镜对样本的图像进行累积的方法，包括以下步骤： - 将来自源的辐射束通过照射器定向以照射样本的表面S; - 使用检测器来响应于所述照射来检测从样品发出的辐射通量; - 使所述光束相对于所述表面遵循扫描路径; - 对于所述扫描路径中的一组采样点中的每一个，记录检测器的输出D n作为所选择的测量参数P的值P n的函数，从而编译测量集M = {（D n，P n）}，其中n是整数序列的成员; - 使用计算机处理装置自动地对测量集M进行解卷积并将其空间地解析成表示样本的深度分辨图像的结果集R，由此在样本内的给定点pi处考虑，该方法包括以下步骤： 在第一探测会话中，采用第一波束配置B 1用相关联的第一点扩展函数F 1照射点pi，由此所述波束配置与所述测量参数不同; - 在至少第二探测会话中，采用第二波束配置B 2以相关联的第二点扩展函数F 2照射点pi，由此F 2在公共重叠区域O i中部分地与F 1重叠，其中点pi 位于; - 在所述计算机处理装置中使用独立分量分析算法来在所述重叠区域O i中执行空间分辨率。

公开(公告)号：EP2924710A1

公开(公告)日：2015-09-30

申请号：EP14161519.5

申请日：2014-03-25

申请人： FEI COMPANY

发明人： Potocek, Pavel ,  Kooijman, Cornelis ,  Slingerland, Hendrik ,  Veen, van, Gerard ,  Boughorbel, Faysal ,  Faber, Pybe

IPC分类号： H01J37/28 ,  H01J37/30

CPC分类号： H01J37/28 ,  H01J37/3005 ,  H01J2237/226 ,  H01J2237/24495 ,  H01J2237/30466 ,  H01J2237/31749

摘要： The invention relates to a multi-beam apparatus (210) for inspecting a sample (232) with at least a first focused beam and a second focused beam, the apparatus equipped to scan the first and the second beam (243, 218) over the sample, the apparatus equipped with at least one detector (240) for detecting secondary radiation emitted by the sample when said sample is irradiated by the first and the second beam, the detector capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, in working the detector signal comprising information caused by the first and the second beam, characterized in that the apparatus is equipped with a programmable controller (219) programmed for processing the detector signal using a source separation technique, as a result of which the programmable controller is equipped to output a signal representing information caused by a single beam.

摘要翻译： 本发明涉及一种用于使用至少第一聚焦光束和第二聚焦光束来检测样品（232）的多光束装置（210），该装置被配备成扫描第一和第二光束（243,218） 所述装置配备有至少一个检测器（240），用于当所述样品被所述第一和第二光束照射时检测由所述样品发射的次级辐射，所述检测器能够输出表示检测到的次级辐射的强度的检测器信号 通过检测器处理包括由第一和第二光束引起的信息的检测器信号，其特征在于，该装置配备有可编程控制器（219），其被编程为使用源分离技术来处理检测器信号，作为 可编程控制器被配备为输出表示由单个波束引起的信息的信号。

公开(公告)号：EP4064323A1

公开(公告)日：2022-09-28

申请号：EP22163350.6

申请日：2022-03-21

申请人： FEI Company

发明人： Potocek, Pavel ,  Schoenmakes, Remco ,  Peemen, Maurice ,  Freitag, Bert

IPC分类号： H01J37/26

摘要： Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.