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1.ETCHING METHOD, AND METHOD OF PRODUCING SEMICONDUCTOR SUBSTRATE PRODUCT AND SEMICONDUCTOR DEVICE USING THE SAME, AS WELL AS KIT FOR PREPARATION OF ETCHING LIQUID 审中-公开
标题翻译: 用于制造半导体基板产物及半导体部件腐蚀和方法和试剂盒用于生产蚀刻公开(公告)号:EP2875520A4
公开(公告)日:2016-02-24
申请号:EP13819335
申请日:2013-07-17
申请人: FUJIFILM CORP
IPC分类号: H01L21/3213 , C09K13/00 , C09K13/06 , H01L21/311
CPC分类号: H01L21/30604 , C09K13/00 , C09K13/02 , C09K13/06 , C23F1/00 , C23F1/02 , C23F1/14 , C23F1/26 , C23F1/38 , C23F1/44 , C23G1/106 , C23G1/205 , H01L21/02063 , H01L21/31144 , H01L21/32134 , H01L21/6704
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2.ETCHING METHOD, AND METHOD OF PRODUCING SEMICONDUCTOR SUBSTRATE PRODUCT AND SEMICONDUCTOR DEVICE USING THE SAME 审中-公开
标题翻译: 蚀刻和一种用于生产半导体衬底制品和半导体组件公开(公告)号:EP2875521A4
公开(公告)日:2016-03-02
申请号:EP13819989
申请日:2013-07-17
申请人: FUJIFILM CORP
IPC分类号: H01L21/3213 , H01L21/311
CPC分类号: H01L21/30608 , H01L21/02063 , H01L21/31144 , H01L21/32134
摘要: An etching method, having the step of applying an etching liquid onto a TiN-containing layer in a semiconductor substrate thereby etching the TiN-containing layer, the etching liquid comprising water, and a basic compound and an oxidizing agent in water thereof to be within the range of pH from 8.5 to 14, and the TiN-containing layer having a surface oxygen content from 0.1 mol % to 10 mol %.
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3.COLOR FILTER, CCD SENSOR, CMOS SENSOR, ORGANIC CMOS SENSOR, AND SOLID-STATE IMAGE SENSOR 审中-公开
标题翻译: 彩色滤光片的CCD传感器,CMOS传感器,有机CMOS传感器和图像传感器SOLID STATE公开(公告)号:EP2718753A4
公开(公告)日:2015-05-06
申请号:EP12796829
申请日:2012-05-24
申请人: FUJIFILM CORP
发明人: TAGUCHI HIROSHI , MURO NAOTSUGU , YAMADA MAKOTO
CPC分类号: H01L31/0232 , C09B23/04 , C09B69/105 , G02B5/201 , G02B5/223 , G03F7/0007 , H01L27/14621
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公开(公告)号:EP2572243A4
公开(公告)日:2014-01-22
申请号:EP11783674
申请日:2011-05-17
申请人: FUJIFILM CORP
发明人: MURO NAOTSUGU , IKEDA KIMI , SHIMADA KAZUTO , ARIOKA DAISUKE
CPC分类号: C08L35/02 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0043 , G03F7/0047 , G03F7/031 , G03F7/033 , G03F7/035 , G03F7/0388 , G03F7/0755
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5.COLORING COMPOSITION, THERMAL TRANSFER RECORDING INK SHEET, THERMAL TRANSFER RECORDING METHOD, COLOR TONER, INKJET INK, COLOR FILTER, AND ARYLIDENE-PYRAZOLONE DYE 有权
标题翻译: 染料组合物,热转印记录墨水纸,热转印记录方法,碳粉,墨水,彩色滤光片与亚芳基吡唑啉酮染料公开(公告)号:EP2257600A4
公开(公告)日:2011-05-25
申请号:EP09714778
申请日:2009-02-27
申请人: FUJIFILM CORP
IPC分类号: C09B23/00 , B41J2/01 , B41M5/00 , B41M5/382 , B41M5/385 , B41M5/388 , B41M5/39 , B41M5/50 , B41M5/52 , C09B67/20 , C09B67/42 , C09D11/00 , C09D11/30 , G02B5/20 , G02B5/22 , G03F7/004 , G03G9/09
CPC分类号: B41M5/3854 , C09B23/0091 , C09B23/04 , C09D11/328 , G02B5/201 , G03G9/0914 , G03G9/0916 , G03G9/092 , Y10T428/24802
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