摘要:
A diaphragm valve comprises: a body (1) having an inflow passage (1a), an outflow passage (1b), a concave valve chamber (1c) and a valve seat (1d); a metallic main diaphragm (2) which holds airtightness of the valve chamber (1c) and makes contact with and separates from the valve set (1d) directly or indirectly; a bonnet (4) which securely holds an outer circumferential edge portion of the main diaphragm (2) between the body 1 and the bonnet 4; and a stem 5 which causes the main diaphragm (2) to be deformed elastically. At the top surface side of the aforementioned main diaphragm (2) there is arranged a metallic sub-diaphragm (3) whose outer circumferential edge portion can be elastically deformed in a vertical direction. A center portion of the aforementioned sub-diaphragm (3) is fixed to a center portion of the main diaphragm (2), so that the sub-diaphragm (3) comes in contact with the top surface side of the main diaphragm (2) to support a bend thereof when the main diaphragm is deformed elastically.
摘要:
An annular recess is formed in an inner periphery defining a bolt shank bore (114) and has fitted therein an annular elastic member (115) having elasticity radially thereof and having an inside diameter smaller than the outside diameter of the shank of a bolt (113). The shank bore (114) has at an intermediate part thereof a stepped portion so as to give an increased diameter to a bore portion from the intermediate part to one end of the bore, and a hollow cylindrical member for preventing the elastic member from slipping out is inserted in the shank bore (114) from the bore end so as to form a clearance between the stepped portion and the preventing member, whereby the annular recess is formed.
摘要:
Lower members (31,33) each have a bolt bore (107) comprising a large-diameter portion (107a) larger than the head (110a) of a bolt (110) in diameter, and a small diameter portion (107b) extending downward from the large-diameter portion (107a) with a stepped portion (107c) formed therebetween and having a diameter intermediate between the diameter of the bold head (110a) and the diameter of the shank (110b) of the bolt (110). The small-diameter portion (107b) of the bolt bore (107) has fitted therein a hollow cylindrical spacer (111) with an inside diameter larger than the diameter of the bolt shank (110b). The spacer (111) has a lower end supported by a support member (108) and an upper end positioned in the large-diameter portion (107a). A hollow cylindrical elastic member (112) is interposed between the bolt head (110a) and the stepped portion (107c) for biasing the lower member (31,33) toward the support member (108).
摘要:
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.