公开(公告)号：EP1585002A1

公开(公告)日：2005-10-12

申请号：EP04702837.8

申请日：2004-01-16

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro ,  TOKYO ELECTRON LIMITED

发明人： OHMI, Tadahiro ,  SUGIYAMA, Kazuhiko ,  MIZUSAWA, Kenetu, c/o Tokyo Electron Ltd ,  TAKAHASHI, Eiji, c/o Tokyo Electron Ltd ,  UNO, Tomio, c/o Fujikin Incorporated ,  NISHINO, Kouji, c/o Fujikin Incorporated ,  DOHI, Ryousuke, c/o Fujikin Incorporated ,  IKEDA, Nobukazu, c/o Fujikin Incorporated ,  NAGASE, Masaaki, c/o Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： H01L21/67023 ,  G05D7/0635 ,  Y10T137/6416 ,  Y10T137/6606 ,  Y10T137/7761

摘要： A high precision flow rate control of a clustering fluid such as the HF gas and the like to be supplied to a vacuum chamber and the like is made possible in the flow rate range of 3∼300SCCM using a pressure type flow rate control device.
Specifically, disclosed herein is a method of controlling the flow rate of the clustering fluid using a pressure type flow rate control device in which the flow rate Q of the gas passing through an orifice is computed as K=KP 1 (where K is a constant) with the gas being in a state where the ratio P 2 /P 1 between the gas pressure P 1 on the upstream side of the orifice and the gas pressure P 2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the afore-mentioned pressure type flow rate control device to the temperature higher than 40°C, or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so that the clustering fluid is permitted to pass through the afore-mentioned orifice in a monomolecular state.

公开(公告)号：EP1901154A1

公开(公告)日：2008-03-19

申请号：EP06767569.4

申请日：2006-06-22

申请人： FUJIKIN INCORPORATED ,  National University Corporation Tohoku Unversity ,  TOKYO ELECTRON LIMITED

发明人： OHMI, Tadahiro ,  SAITO, Masahito ,  HINO, Shoichi ,  SHIMAZU, Tsuyoshi, c/o Tokyo Electron AT Ltd. ,  MIURA, Kazuyuki, c/o Tokyo Electron AT Ltd. ,  NISHINO, Kouji, c/o Fujikin Incorporated ,  NAGASE, Masaaki, c/o Fujikin Incorporated ,  SUGITA, Katsuyuki, c/o Fujikin Incorporated ,  HIRATA, Kaoru, c/o Fujikin Incorporated ,  DOHI, Ryousuke, c/o Fujikin Incorporated ,  HIROSE, Takashi, c/o Fujikin Incorporated ,  SHINOHARA, Tsutomu, c/o Fujikin Incorporated ,  IKEDA, Nobukazu, c/o Fujikin Incorporated ,  IMAI, Tomokazu, c/o Fujikin Incorporated ,  YOSHIDA, Toshihide, c/o Fujikin Incorporated ,  TANAKA, Hisashi, c/o Fujikin Incorporated

IPC分类号： G05D7/00 ,  G01F1/00 ,  G01F1/42 ,  G01F7/00

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： It is so made that a flow rate control apparatus can be downsized and its installation costs can be reduced by achieving accurate flow rate control of a fluid over a wider flow quantity range with one set of flow rate control apparatus.
Specifically, with a pressure type flow rate control apparatus wherein a flow rate of a fluid passing through an orifice 8 is computed as Qc=KP 1 (where K is a proportionality constant), or as Qc=KP 2 m (P 1 - P 2 ) n (where K is a proportionality constant, m and n constants), by using an orifice upstream side pressure P 1 and/or an orifice downstream side pressure P 2 , a fluid passage between the downstream side of a control valve and a fluid supply pipe of said pressure type flow rate control apparatus are made to be more than at least 2 fluid passages in parallel, wherein orifices having different flow rate characteristics are provided with the afore-mentioned fluid passages arranged in parallel, the afore-mentioned fluid in a small floe quantity range is made to flow to one orifice for the flow control of the fluid in the small flow quantity range, while the afore-mentioned fluid in a large flow quantity range is made to flow to the other orifice for the flow control of the fluid in the large flow quantity range.

摘要翻译： 通过一套流量控制装置，通过在较宽的流量范围内实现流体的精确的流量控制，可以使流量控制装置小型化并且可以降低安装成本。 具体地说，对于压力型流量控制装置，其中通过孔口8的流体的流量被计算为Qc = KP 1（其中K是比例常数），或者作为Qc = KP 2 m（P 1 -P 2）n（其中K是比例常数，m和n常数），通过使用孔口上游侧压力P 1和/或孔口下游侧压力P 2，在控制阀的下游侧和 所述压力式流量控制装置的流体供给管被制成大于至少两个并联的流体通道，其中具有不同流量特性的孔设置有并联布置的上述流体通道，前述流体 在小流量范围内，使小流量范围流到一个孔口，用于在小流量范围内的流体的流量控制，同时使大流量范围内的上述流体流向另一个用于流动的孔口 控制流体 在大流量范围内。