公开(公告)号：EP1918799A4

公开(公告)日：2009-05-06

申请号：EP06746185

申请日：2006-05-10

申请人： FUJIKIN KK ,  NAT UNIVERSITY CORP TOHOKU UNV

发明人： OHMI TADAHIRO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  IKEDA NOBUKAZU ,  NAGASE MASAAKI ,  HIRATA KAORU ,  SUGITA KATSUYUKI ,  SHINOHARA TSUTOMU ,  HIROSE TAKASHI ,  IMAI TOMOKAZU ,  YOSHIDA TOSHIHIDE ,  TANAKA HISASHI

IPC分类号： G05D7/06 ,  F16K27/00 ,  F16L55/00 ,  G01F1/42

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow controller capable of easily changing a control flow by easily changing an orifice without disassembling and assembling the flow controller. In the flow controller (A), the valve body (23) of a control valve (2) is disposed between an inlet side mounting block (39) having a connection part for a fluid feed pipe and an outlet side mounting block (43) having a connection part for a fluid takeout pipe, and the fluid inlet side of the valve body (23) is releasably connected airtight to the inlet side mounting block (39) and the fluid outlet side of the valve body (23) is releasably connected airtight to the outlet side mounting block (43) to form a flow passage allowing gases to flow therein through the control valve (2). The gasket type orifice (38) of the flow controller (A) is detachably inserted between a gasket type orifice insertion hole (42c) formed on the outlet side of the valve body (23) and a gasket type orifice insertion hole (43b) in the outlet side mounting block (43).

公开(公告)号：EP1615000A4

公开(公告)日：2006-06-14

申请号：EP04710538

申请日：2004-02-12

申请人： FUJIKIN KK

发明人： IKEDA NOBUKAZU ,  HIRATA KAORU ,  NISHINO KOUJI ,  DOHI RYOUSUKE

IPC分类号： G01F1/692 ,  G01F1/684 ,  G01F1/68

CPC分类号： G01F1/6845

摘要： A thermal type mass flow rate sensor made of corrosion resistant metal, enhancing the corrosion resistance of the thermal type mass flow rate sensor, improvement in responsivity, and making possible freedom from particles, prevention of variation in product quality, etc.; and fluid supply equipment using the same. Specifically, a thermal type mass flow rate sensor is composed of a sensor (1) comprising a corrosion resistant metal substrate (2) formed as a thin sheet on the back surface of a corrosion resistant metal material (W) by application of electrolytic etching, and a thin film (F) forming a temperature sensor (3) and a heater (4) disposed on the back surface of the corrosion resistant metal substrate (2), and a sensor base (13) hermetically fixed by laser-welding the outer peripheral surface of the corrosion resistant metal substrate (2) of the sensor (1) fitted in an attaching groove (13a).

公开(公告)号：EP1719981A4

公开(公告)日：2007-11-07

申请号：EP05703505

申请日：2005-01-13

申请人： FUJIKIN KK

发明人： HIRATA KAORU ,  IKEDA NOBUKAZU ,  NISHINO KOUJI ,  DOHI RYOUSUKE

IPC分类号： G01F1/00 ,  G01F1/68 ,  G01F1/684 ,  G01F1/692 ,  G01F1/696 ,  G01F15/04 ,  G01L9/00 ,  G01L19/00 ,  G05D7/06

CPC分类号： G01L19/0023 ,  G01F1/6842 ,  G01F1/6845 ,  Y10T137/7761

摘要： A fluid sensor of an anticorrosive metal comprises a thermal mass flow sensor having an enhanced anticorrosiveness. The measurement accuracy is stable against pressure variation, the response is improved, the senor is free of particles, variation of product quality is prevented, and pressure measurement is possible. A fluid supply device using this fluid sensor is also disclosed. Specifically, the fluid sensor comprises an anticorrosive metal substrate (2), a mass flow sensor section (1) composed of a thin film forming a temperature sensor (3a) and a heater (3b) provided on the back side opposite to the front side of a fluid-contact body of the anticorrosive metal substrate (2), and a pressure sensor section (4) composed of a thin film forming a strain sensor element (4a) provided on the back side opposite to the front side of the fluid-contact body of the anticorrosive metal substrate (2). This fluid sensor is for measuring the mass flow and pressure of a fluid.

公开(公告)号：EP1471340A4

公开(公告)日：2006-09-06

申请号：EP03701810

申请日：2003-01-20

申请人： FUJIKIN KK ,  ESASHI MASAYOSHI

发明人： ESASHI MASAYOSHI ,  HIRATA KAORU

IPC分类号： G01L9/00

CPC分类号： G01L9/0017

摘要： A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.