公开(公告)号：EP3383632A1

公开(公告)日：2018-10-10

申请号：EP16805365.0

申请日：2016-11-29

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ,  Friedrich-Schiller-Universität Jena

发明人： BEIER, Matthias ,  HARTUNG, Johannes ,  DAMM, Christoph ,  RISSE, Stefan ,  SATZER, Britta

IPC分类号： B29D11/00 ,  G02B17/08

CPC分类号： B29D11/00932 ,  G02B17/086

摘要： The invention relates to a method for producing an optical component (1) having at least three monolithically arranged optical functional surfaces (7, 8, 9, 10) on two different sides of an optical component (1), comprising the steps of calculating a continuous surface composite (22) having at least two optical functional surfaces (7, 9), producing the continuous surface composite (22), the production of at least one reference surface (1), repositioning the optical component (1), wherein the at least one reference surface (1) serves as an assembly surface, producing at least one further optical functional surface (8, 10) on the second side of the optical component (1), measuring the shape and position of the optical functional surfaces (7, 8, 9, 10), and repeating the steps of processing the first and second optical functional surfaces (7, 9), repositioning the optical component (1) and processing the at least one further optical functional surface (8, 10) for corrective processing of the optical functional surfaces (7, 8, 9, 10).

公开(公告)号：EP3224570B1

公开(公告)日：2020-01-08

申请号：EP15812971.8

申请日：2015-11-26

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ,  Friedrich-Schiller-Universität Jena

发明人： BEIER, Matthias ,  STUMPF, Daniela ,  GEBHARDT, Andreas ,  RISSE, Stefan ,  ZEITNER, Uwe D.

IPC分类号： G01B9/02 ,  G01M11/00 ,  G03H1/08 ,  G02B27/42

公开(公告)号：EP3820685A1

公开(公告)日：2021-05-19

申请号：EP19736367.4

申请日：2019-07-03

申请人： Fraunhofer Gesellschaft zur Förderung der angewandten Forschung E.V.

发明人： BEIER, Matthias ,  RISSE, Stefan ,  GEBHARDT, Andreas

IPC分类号： B29D11/00 ,  G02B7/182

公开(公告)号：EP3224570A1

公开(公告)日：2017-10-04

申请号：EP15812971.8

申请日：2015-11-26

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ,  Friedrich-Schiller-Universität Jena

发明人： BEIER, Matthias ,  STUMPF, Daniela ,  GEBHARDT, Andreas ,  RISSE, Stefan ,  ZEITNER, Uwe D.

IPC分类号： G01B9/02 ,  G01M11/00 ,  G03H1/08 ,  G02B27/42

摘要： The invention relates to a method and a device for the interferometric testing of the shape and/or position of at least two optical functional surfaces (13, 14) using an interferometric testing structure comprising an interferometer (9), a beam-shaping optical element (1), and alignment marks (15, 16, 17, 18). The beam-shaping optical element (1) is used to generate alignment wave fronts and testing wave fronts which are transmitted to or reflected at the alignment marks (15, 16, 17, 18) and/or the optical functional surfaces (13, 14), whereby measurement wave fronts are generated. The method and the device allow a measurement of the position of the optical functional surfaces (13, 14) with respect to one another and/or with respect to the alignment marks (15, 16, 17, 18) and a determination of shape and/or positional deviations of the optical functional surfaces (13, 14) from the target geometry and/or position of said surfaces by analyzing the measurement wave fronts in the interferometer (9).

摘要翻译： 本发明涉及一种使用干涉测试结构对至少两个光学功能表面（13,14）的形状和/或位置进行干涉测试的方法和设备，所述干涉测试结构包括干涉仪（9），束成形光学元件 （1）和对准标记（15,16,17,18）。 光束整形光学元件（1）用于产生对准波前和测试波阵面，所述波阵面被传输到或反射在对准标记（15,16,17,18）和/或光学功能表面（13,14 ），由此产生测量波阵面。 该方法和装置允许测量光学功能表面（13,14）相对于彼此和/或相对于对准标记（15,16,17,18）的位置以及确定形状和 /或通过分析干涉仪（9）中的测量波阵面，光学功能表面（13,14）与目标几何形状和/或所述表面的位置的位置偏差。