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    MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME
    1.
    发明公开
    MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    微电子机械系统及其制造方法

    公开(公告)号：EP3227898A1

    公开(公告)日：2017-10-11

    申请号：EP14808601.0

    申请日：2014-12-04

    申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ,  Sony Corporation

    发明人： KURTH, Steffen ,  VOIGT, Sven ,  HAAS, Sven ,  IKEDA, Koichi ,  AKIRA, Akiba

    IPC分类号： H01H59/00 ,  H01P1/12 ,  H01P3/02 ,  H01P3/08 ,  H01H1/00

    CPC分类号： H01H59/0009 ,  H01H2001/0078 ,  H01P1/127

    摘要： A MEMS comprises a stack comprising a first layer and a second layer having sides facing each other. The first layer and the second layer are attached to each other by a contact material at opposing contact regions of the sides of the first and the second layer. The contact material forms a distance between the sides of the first and the second layer. A first signal line is arranged at the side of the first layer. A second signal line is arranged at the side of the second layer. The first signal line, at a first longitudinal portion of the first signal line, laterally extends through the contact region of the first side of the first layer. The second signal line comprises a void in a void region at a location in the corresponding contact region of the side of the second layer and opposing the first signal line, The first signal line, at a second longitudinal portion of the first signal line, faces the second signal line spaced apart from the second signal line.

    摘要翻译： MEMS包括包括第一层和第二层的叠层，所述第一层和第二层具有彼此面对的侧面。 第一层和第二层通过接触材料在第一层和第二层的侧面的相对接触区域处彼此附接。 接触材料形成第一层和第二层的侧面之间的距离。 第一信号线布置在第一层的一侧。 第二信号线布置在第二层的一侧。 第一信号线在第一信号线的第一纵向部分横向延伸穿过第一层的第一侧的接触区。 第二信号线包括在第二层的侧面的相应接触区域中的与第一信号线相对的位置处的空白区域中的空隙。第一信号线在第一信号线的第二纵向部分处面对 第二信号线与第二信号线间隔开。

    MICROELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME
    2.
    发明公开
    MICROELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    微电子机械开关及其制造方法

    公开(公告)号：EP3227895A1

    公开(公告)日：2017-10-11

    申请号：EP14806648.3

    申请日：2014-12-04

    申请人： Fraunhofer Gesellschaft zur Förderung der angewandten Forschung E.V. ,  Sony Corporation

    发明人： KURTH, Steffen ,  VOIGT, Sven ,  HAAS, Sven ,  IKEDA, Koichi ,  AKIRA, Akiba

    IPC分类号： H01H1/00 ,  H01H59/00

    CPC分类号： H01H1/0036 ,  H01H59/0009 ,  H01H2001/0052 ,  H01H2001/0078

    摘要： A MEMS switch comprises a first and a second contact arrangement having a side facing each other, the first and the second contact arrangement movable with respect to each other and configured for providing an electric contact in a first state and for not providing the electric contact in a second state. A first contact material is arranged at the side of the first contact arrangement. A second contact material is arranged at the side of the second contact arrangement. The side of the first and/or the side of the second contact arrangement comprises a recessed region and a projected region projected with respect to the recessed region, the projected region and the recessed region separated from each other by a tear-off edge. The first and/or the second contact material is arranged at the recessed region and at the projected region of the respective side. The electric contact is provided between the first and the second contact material in the projected region of the sides and not provided in the recessed region in the first state.

    摘要翻译： MEMS开关包括第一和第二触点装置，该第一和第二触点装置具有彼此面对的一侧，第一和第二触点装置相对于彼此可移动并且被配置用于提供处于第一状态的电触点并且不提供电触点 第二个状态。 第一触点材料布置在第一触点布置的侧面。 第二触点材料布置在第二触点布置的侧面。 第二接触装置的第一侧和/或侧面包括凹入区域和相对于凹入区域突出的突出区域，突出区域和凹入区域通过撕开边缘彼此分开。 第一和/或第二接触材料布置在相应侧的凹入区域和突出区域处。 电触头设置在第一和第二触头材料之间的侧面的突出区域中，并且在第一状态下不设置在凹陷区域中。