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1.发明公开ANODE FÜR DIE BILDUNG EINES PLASMAS DURCH AUSBILDUNG ELEKTRISCHER BOGENENTLADUNGEN 审中-公开阳极等离子体通过培训电弧放电的教育
公开(公告)号：EP2140475A2
公开(公告)日：2010-01-06
申请号：EP08757989.2
申请日：2008-04-21
CPC分类号： H01J37/32541 , C23C14/0605 , C23C14/325 , H01J37/32055 , H01J37/32339 , H01J37/3438
摘要： The invention relates to an anode for producing a plasma by way of electric arc discharges, starting from a target that is connected as the cathode, for coating substrates with a target material in vacuo. The aim of the invention is to find a solution allowing at least an increase in the coating rate without substantially increasing the required equipment complexity. The anode for producing a plasma by forming electric arc discharges, staring from a target that is connected as the target, is arranged at a distance to the target in a conventional manner. Anode bars that are initially parallel to the surface of the target are present on the anode. Strip elements are configured on the anode and are separated by gaps. Said strip elements start from the anode bar and point in the direction of the surface of a substrate to be coated. The plasma produced is surrounded by the strip elements of the anode on two opposite sides.
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公开(公告)号：EP2142681B1
公开(公告)日：2012-08-22
申请号：EP08757988.4
申请日：2008-04-21
CPC分类号： C23C14/325 , C23C14/564 , H01J37/32009 , H01J37/32055 , H01J37/32339 , H01J37/3266
摘要： The invention relates to an arrangement for producing coatings on substrates in vacuo. A plasma is produced by electric arc discharge on a target that is connected as the cathode and the arc discharge between an anode and the target is ignited by means of a mobile focused laser beam that is directed through a window onto the surface of the target. The aim of the invention is to provide a technical solution that allows an undesired coating in the window zone of a vacuum chamber to be considerably reduced. To achieve this aim, a permanent magnet or electromagnet is arranged between the window and at least one target laterally next to, above or below the optical axis of the laser beam and the laser beam is guided through a magnetic filed produced by the permanent magnet or electromagnet.
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公开(公告)号：EP1117852B1
公开(公告)日：2002-07-31
申请号：EP99968251.1
申请日：1999-08-20
摘要： The invention relates to a method and a device for coating substrates in a vacuum. A plasma is produced from a target using a laser beam and ionised particles of the plasma are precipitated on the substrate in the form of a layer, inert reactive gas or a gaseous mixture being supplied. The aim of the invention is to provide a means of supplying gases or gaseous mixtures in a spatially and temporally defined manner. To this end, the gas or gaseous mixture is conveyed to the plasma out of or through a porous target, the target acting as an intermediate storage medium by virtue of its porosity.
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公开(公告)号：EP2142681A2
公开(公告)日：2010-01-13
申请号：EP08757988.4
申请日：2008-04-21
CPC分类号： C23C14/325 , C23C14/564 , H01J37/32009 , H01J37/32055 , H01J37/32339 , H01J37/3266
摘要： The invention relates to an arrangement for producing coatings on substrates in vacuo. A plasma is produced by electric arc discharge on a target that is connected as the cathode and the arc discharge between an anode and the target is ignited by means of a mobile focused laser beam that is directed through a window onto the surface of the target. The aim of the invention is to provide a technical solution that allows an undesired coating in the window zone of a vacuum chamber to be considerably reduced. To achieve this aim, a permanent magnet or electromagnet is arranged between the window and at least one target laterally next to, above or below the optical axis of the laser beam and the laser beam is guided through a magnetic filed produced by the permanent magnet or electromagnet.
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5.发明授权
公开(公告)号：EP1110234B1
公开(公告)日：2006-12-06
申请号：EP99941651.4
申请日：1999-08-20
IPC分类号： H01J37/32
CPC分类号： H01J37/32055 , H01J2237/022
摘要： The invention relates to a device and method for coating substrates in a vacuum. A plasma is produced from a target using a laser beam and ionised particles of the plasma are precipitated on the substrate in the form of a layer. This is a known process which has been used in PVD methods for some time. The aim of the invention is to provide a means of preventing droplets and particles which could have a negative effect on the properties of the deposited layer from settling in said layer, or at least to reduce the number of such droplets and particles. To this end, an absorber electrode with a positive electric potential is used. Said absorber electrode is situated a few mm away from the bottom end of the plasma, in front of or next to said plasma and is shaped in such a way that an electric field forms around the absorber electrode. The electrical field vector should be oriented at least approximately orthogonally to the direction of movement of the ionised particles of plasma.
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