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公开(公告)号:EP0803329A2
公开(公告)日:1997-10-29
申请号:EP97302667.7
申请日:1997-04-18
发明人: Kudo, Michio, c/o Fujikoshi Kikai Kogyo K.K. , Inada, Yasuo, c/o Fujikoshi Kikai Kogyo K.K. , Nakajima, Makoto, Fujikoshi Kikai Kogyo K.K. , Fukushima, Masanori, Fujikoschi Kikai Kogyo K.K.
IPC分类号: B24B37/04
CPC分类号: B24B37/105 , B24B47/10
摘要: A polishing machine of the present invention is capable of uniformly polishing a member (20) to be polished with high flatness, and polishing cloth, which is employed in the polishing machine, can be uniformly abraded. In the polishing machine, a polishing plate (10) is capable of rotating. A supporting table (22) rotatably supports the polishing plate (10). A rotary driving mechanism (25) is mounted on the supporting table (22), and it (25) rotates the polishing plate (10). A base (30) supports the supporting table (22). An orbital driving mechanism (32) moves the supporting table (22) along a circular orbit without spinning about its own axis.
摘要翻译: 本发明的抛光机能够以高的平坦度均匀地抛光要被抛光的构件(20),并且可以均匀地研磨抛光机中使用的抛光布。 在抛光机中,抛光板(10)能够旋转。 支撑台(22)可旋转地支撑抛光板(10)。 旋转驱动机构(25)安装在支撑台(22)上,并且它(25)旋转抛光板(10)。 底座(30)支撑支撑台(22)。 轨道驱动机构(32)使支撑台(22)沿着圆形轨道移动,而不绕其自身轴线旋转。
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公开(公告)号:EP0803329B1
公开(公告)日:2002-03-27
申请号:EP97302667.7
申请日:1997-04-18
发明人: Kudo, Michio, c/o Fujikoshi Kikai Kogyo K.K. , Inada, Yasuo, c/o Fujikoshi Kikai Kogyo K.K. , Nakajima, Makoto, Fujikoshi Kikai Kogyo K.K. , Fukushima, Masanori, Fujikoschi Kikai Kogyo K.K.
CPC分类号: B24B37/105 , B24B47/10
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公开(公告)号:EP0803329A3
公开(公告)日:1998-04-15
申请号:EP97302667.7
申请日:1997-04-18
发明人: Kudo, Michio, c/o Fujikoshi Kikai Kogyo K.K. , Inada, Yasuo, c/o Fujikoshi Kikai Kogyo K.K. , Nakajima, Makoto, Fujikoshi Kikai Kogyo K.K. , Fukushima, Masanori, Fujikoschi Kikai Kogyo K.K.
IPC分类号: B24B37/04
CPC分类号: B24B37/105 , B24B47/10
摘要: A polishing machine of the present invention is capable of uniformly polishing a member (20) to be polished with high flatness, and polishing cloth, which is employed in the polishing machine, can be uniformly abraded. In the polishing machine, a polishing plate (10) is capable of rotating. A supporting table (22) rotatably supports the polishing plate (10). A rotary driving mechanism (25) is mounted on the supporting table (22), and it (25) rotates the polishing plate (10). A base (30) supports the supporting table (22). An orbital driving mechanism (32) moves the supporting table (22) along a circular orbit without spinning about its own axis.
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