公开(公告)号：EP4011552A1

公开(公告)日：2022-06-15

申请号：EP20849840.2

申请日：2020-07-30

申请人： Fujimi Incorporated

发明人： FURUTA, Shinji ,  HAYAKAWA, Takashi ,  ASHITAKA, Keiji ,  MIWA, Naoya ,  TSUCHIYA, Kohsuke ,  TANSHO, Hisanori ,  AKIZUKI, Reiko

IPC分类号： B24B57/02 ,  C09G1/02 ,  B24B37/00 ,  H01L21/304

摘要： Provided is a method for filtering an additive-containing liquid that can achieve a polishing composition exhibiting excellent defect reducing capability while maintaining a practical filter life. The method for filtering a polishing additive-containing liquid provided by the present invention includes the step of: filtering the polishing additive-containing liquid with a filter that satisfies the following conditions (1) and (2). (1) The average pore diameter P measured by a palm porometer is 0.15 µm or less. (2) The pore diameter gradient (S in /S out ), which is the ratio of the inlet-side average pore diameter (Sin) to the outlet-side average pore diameter (S out ), both diameters being measured through observation with an SEM, is 3 or less.

公开(公告)号：EP4159700A1

公开(公告)日：2023-04-05

申请号：EP21813662.0

申请日：2021-05-14

申请人： Fujimi Incorporated ,  Obayashi Corporation ,  Nagoya Institute Of Technology

发明人： HAYAKAWA, Takashi ,  MIWA, Naoya ,  ASHITAKA, Keiji ,  HITOMI, Takashi ,  TAGUCHI, Nobuko ,  SHIRAI, Takashi ,  XIN, Yunzi

IPC分类号： C04B14/04 ,  C04B18/08 ,  C04B28/26

摘要： The present invention provides means capable of imparting high temporal stability to a hardening aid solution which serves as a raw material and capable of imparting high strength and high quality stability to a hardened body of the self-hardening material, in the hardened body of the self-hardening material that contains a ceramic powder containing Si element at least on the surface thereof. The present invention relates to a hardening aid solution containing Si element, an alkali, and a dispersing medium, wherein the dispersing medium contains water; a dissolution concentration of the Si element is 20000 mass ppm or more; the number of moles of the alkali present in 1 kg of the dispersing medium is 2 mol/kg or more; an absolute value of an amount of change in a dissolution concentration of Si element in a solution obtained by diluting the hardening aid solution by 2 times based on the mass using an aqueous KOH solution having a concentration of 3 mol/L is 2000 mass ppm or less, between before and after a heat dissolution test including heating the solution at a solution temperature of 80°C for 5 hours, and then allowing the solution to stand in an ambient environment at 25°C for 1 hour; and the hardening aid solution is used for hardening a powder containing a ceramic powder containing Si element at least on the surface thereof.