Patent search ap:("GEORGIA TECH RES INST") AND inv:"HENDERSON CLIFFORD LEE" Page 1

1.

发明公开
POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF 审中-公开
Title translation: 聚合物，利用这种AND METHOD FOR这种切割方法

公开(公告)号：EP1551906A4

公开(公告)日：2006-11-02

申请号：EP03809104

申请日：2003-10-16

Applicant: GEORGIA TECH RES INST

Inventor： KOHL PAUL A , ALLEN SUEANN BIDSTRUP , WU XIAOQUN , HENDERSON CLIFFORD LEE

IPC: B81C1/00 , C08J3/28 , C08K5/00 , G03F7/40

CPC classification number: G03F7/004 , B81B2201/058 , B81B2203/0338 , B81B2203/0384 , B81C1/00103 , B81C2201/0108 , C08J3/28 , C08K5/0041 , G03F7/40 , Y10T428/24479

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

2.

发明公开
SACRIFICIAL COMPOSITIONS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF 审中-公开
Title translation: 受害者成分，使用用于切割和方法方法

公开(公告)号：EP1567580A4

公开(公告)日：2008-04-30

申请号：EP03768557

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： KOHL PAUL A , ALLEN SUEANN BIDSTRUP , HENDERSON CLIFFORD LEE , JAYACHANDRAN JOSEPH PAUL , REED HOLLIC KELLEHER , WHITE CELESTA E

IPC: B81B1/00 , B81C1/00 , H01L21/768 , C08J3/28 , G03C1/76 , G03C1/795 , G03C5/00 , G03C5/56

CPC classification number: B81C1/00476 , B81C2201/0108 , H01L21/7682 , Y10S430/114

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.

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