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公开(公告)号:EP3309136A1
公开(公告)日:2018-04-18
申请号:EP17184099.4
申请日:2017-07-31
CPC分类号: F01D5/288 , B05B12/20 , B05D1/322 , B05D3/12 , C04B41/009 , C04B41/52 , C04B41/89 , F05D2220/32 , F05D2300/611 , C04B35/565 , C04B35/806 , C04B35/584 , C04B35/58085 , C04B41/4527 , C04B41/4572 , C04B41/5096 , C04B41/5024
摘要: A method of forming an article (2) includes forming a plurality of channels and ridges (24) in a silicon-containing layer (10) on a surface of a substrate (4) of the article (2) using a mask (60, 90) placed on the surface of the substrate (4) or the silicon-containing layer (10).
摘要翻译: 一种形成物品(2)的方法包括使用掩模(60,60)在物品(2)的基板(4)的表面上的含硅层(10)中形成多个通道和脊(24) 90)放置在衬底(4)或含硅层(10)的表面上。