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公开(公告)号:EP2463619A1
公开(公告)日:2012-06-13
申请号:EP11192790.1
申请日:2011-12-09
发明人: Tao, Li , Song, Guiju , Wan, Xinjun , Harding, Kevin George , Hayashi, Steven Robert , Hoffman, James Joseph , Muchmore, Charles Walter , Williams, Yana Zhang , Xu, Shukuan
CPC分类号: G01B11/2513 , G01B11/2527 , G01S17/36 , G01S17/89
摘要: A measurement system comprises a light source unit, a projection unit and an optics unit. The light source unit is configured to generate a plurality of modulated phase shifted light beams. The projection unit is configured to reflect the modulated phase shifted light beams onto an object surface. The optics unit is configured to capture the modulated phase shifted light beams from the object surface. The measurement system further comprises a photodetector and a processor. The photodetector is configured to receive the modulated phase shifted light beams from the optics unit to generate electrical signals. The processor is configured to retrieve position information of the object surface based on the electrical signals from the photodetector. A measurement method is also presented.
摘要翻译: 测量系统包括光源单元,投影单元和光学单元。 光源单元被配置为产生多个调制相移光束。 投影单元被配置为将调制的相移光束反射到物体表面上。 光学单元被配置为捕获来自物体表面的经调制的相移光束。 测量系统还包括光电检测器和处理器。 光电检测器被配置为从光学单元接收经调制的相移光束以产生电信号。 处理器被配置为基于来自光电检测器的电信号来检索物体表面的位置信息。 还提出了一种测量方法。