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    Ink feed trench etch technique for a fully integrated thermal inkjet printhead
    1.
    发明公开
    Ink feed trench etch technique for a fully integrated thermal inkjet printhead 有权
    Tintenzuführkanal-Ätzverfahrenfüreinen vollintegrierten Thermotintenstrahldruckkopf

    公开(公告)号：EP1241009A2

    公开(公告)日：2002-09-18

    申请号：EP02251654.6

    申请日：2002-03-08

    申请人： Hewlett-Packard Company

    发明人： Trueba, Kenneth E. ,  Haluzak, Charles C. ,  Thomas, David R. ,  Vooren, Colby Van

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  Y10T29/49346

    摘要： A monolithic inkjet printhead (14) formed using integrated circuit techniques is described. A silicon substrate (20) has formed on its top surface a thin polysilicon layer (44) in the area in which a trench (36) is to be later formed in the substrate. The edges of the polysilicon layer align with the intended placement of ink feed holes (26) leading into ink ejection chambers (30). Thin film layers (46, 48), including a resistive layer (24), are formed on the top surface of the silicon substrate and over the polysilicon layer. An orifice layer (28) is formed on the top surface of the thin film layers to define the nozzles (34) and ink ejection chambers (30). A trench mask is formed on the bottom surface of the substrate. A trench is etched (using, for example, TMAH) through the exposed bottom surface of the substrate and to the polysilicon layer. The etching of the polysilicon layer exposes fast etch planes of the silicon. The TMAH then rapidly etches the silicon substrate along the etch planes, thus aligning the edges of the trench with the polysilicon. A wet etch is then performed using a buffered oxide etch (BOE) solution. The BOE will completely etch through the exposed thin film layers on the topside and underside of the substrate, forming ink feed holes through the thin film layers. The trench is now aligned with the ink feed holes due to the polysilicon layer.

    摘要翻译： 描述了使用集成电路技术形成的单片喷墨打印头（14）。 硅衬底（20）在其顶表面上形成在衬底中稍后形成沟槽（36）的区域中的薄多晶硅层（44）。 多晶硅层的边缘与通向墨水喷射室（30）的墨水供给孔（26）的预期位置对准。 包括电阻层（24）的薄膜层（46,48）形成在硅衬底的顶表面上并在多晶硅层上。 在薄膜层的顶表面上形成孔板（28）以限定喷嘴（34）和喷墨室（30）。 在衬底的底表面上形成沟槽掩模。 通过暴露的衬底底表面和多晶硅层蚀刻沟槽（使用例如TMAH）。 多晶硅层的蚀刻暴露了硅的快速蚀刻平面。 然后，TMAH沿着蚀刻平面快速蚀刻硅衬底，从而使沟槽的边缘与多晶硅对准。 然后使用缓冲氧化物蚀刻（BOE）溶液进行湿蚀刻。 京东方将完全蚀刻基板顶面和底面上暴露的薄膜层，形成通过薄膜层的墨水供给孔。 由于多晶硅层，沟槽现在与墨水供给孔对准。

    Ink delivery system
    4.
    发明公开
    Ink delivery system 失效
    Tintenzuführsystem

    公开(公告)号：EP0705695A2

    公开(公告)日：1996-04-10

    申请号：EP95306374.0

    申请日：1995-09-12

    申请人： Hewlett-Packard Company

    发明人： Keefe, Brian J. ,  Ho, May Fong ,  Courian, Kennth J. ,  Steinfield, Steven W. ,  Childers, Winthrop D. ,  Tappon, Ellen R. ,  Trueba, Kenneth E. ,  Chapman, Terri I. ,  Knight, William R. ,  Moritz, Jules G., III

    IPC分类号： B41J2/05 ,  B41J2/16

    CPC分类号： B41J2/14024 ,  B41J2/04543 ,  B41J2/04546 ,  B41J2/0458 ,  B41J2/1404 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/14145 ,  B41J2/14201 ,  B41J2/1433 ,  B41J2/1603 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1643 ,  B41J2/175 ,  B41J2/17509 ,  B41J2/17513 ,  B41J2/1752 ,  B41J2/17523 ,  B41J2/17526 ,  B41J2/1753 ,  B41J2/17553 ,  B41J2/17556 ,  B41J2002/14387 ,  B41J2202/13

    摘要： An inkjet print cartridge (10) comprises an ink reservoir (12); a substrate (28) having a plurality of ink firing chambers (130) arranged in first and second arrays and spaced so as to provide 600 dots per inch printing. An ink channel connects the reservoir with the ink firing chambers and includes a primary channel (52) connected to the reservoir and to a secondary channel. A separate inlet passage (132) for each firing chamber connects the secondary channel to the chamber to allow high frequency refill thereof. A group of firing chambers in adjacent relationship form a primitive (P1-P14) in which only one firing chamber is activated at a time. A first circuit (78) on the substrate is connected to the firing elements; which a second circuit (36) on the cartridge is connected to the first circuit for transmitting firing signals to the firing elements at a predetermined frequency. Half of the firing chambers is located along one edge (86) of the substrate while the other half is located along an opposite edge of the substrate. Demultiplexing circuitry (78) on the substrate allows actuation signals and addressing signals for all 300 firing chambers to be provided through only 52 interconnect pads (20).

    摘要翻译： 喷墨打印墨盒（10）包括墨水储存器（12）; 具有布置在第一和第二阵列中并间隔开以提供600点/英寸印刷的多个喷墨室（130）的基底（28）。 墨水通道将储存器连接到喷墨室，并且包括连接到储存器和辅助通道的主通道（52）。 用于每个发射室的单独的入口通道（132）将次级通道连接到室以允许其高频率再充填。 相邻关系中的一组发射室形成一个原始（P1-P14），其中一次只激活一个发射室。 基板上的第一电路（78）与发光元件连接; 所述盒上的第二电路（36）连接到所述第一电路，用于以预定频率向所述击发元件发射发射信号。 一半的发射室位于衬底的一个边缘（86）上，而另一半位于衬底的相对边缘。 基板上的解复用电路（78）允许仅通过52个互连焊盘（20）提供用于所有300个发射室的致动信号和寻址信号。

    Mask design for forming tapered inkjet nozzles
    6.
    发明公开
    Mask design for forming tapered inkjet nozzles 失效
    为圆锥形的喷墨喷嘴的制造掩模图案。

    公开(公告)号：EP0624471A3

    公开(公告)日：1995-10-18

    申请号：EP93120807.8

    申请日：1993-12-23

    申请人： Hewlett-Packard Company

    发明人： Asakawa, Stuart D. ,  McClelland, Paul H. ,  Tappon, Ellen R. ,  VandePoll, Richard R. ,  Trueba, Kenneth E. ,  Chen, Chien-Hua

    IPC分类号： B41J2/16 ,  B23K26/00

    CPC分类号： B41J2/1634 ,  B41J2/162 ,  B41J2/1631

    摘要： A single mask (30,56,64,70) is used to form a tapered nozzle (48) in a polymer nozzle member (46) using laser ablation. In one embodiment of the mask, clear portions of the mask, corresponding to the nozzle pattern to be formed, each incorporate a variable-density dot pattern (36), where the opaque dots (36) act to partially shield the underlying polymer nozzle member from the laser energy. This partial shielding of the nozzle member under the dot pattern results in the nozzle member being ablated to less of a depth than where there is no shielding. By selecting the proper density of opaque dots around the peripheral portions of the mask openings, the central portion of each nozzle formed in the polymer nozzle member will be completely ablated through, and the peripheral portions of the nozzle will be only partially ablated through. By increasing the density of dots toward the periphery of each mask opening, the resulting nozzle may be formed to have any tapered shape. Other mask patterns are also described.

    Improved plastic orifice plate or an ink jet printhead and method of manufacture
    8.
    发明公开
    Improved plastic orifice plate or an ink jet printhead and method of manufacture 失效
    Kunststofflochplattefüreinen Tintenstrahldruckkopf und Herstellungsverfahren。

    公开(公告)号：EP0317172A2

    公开(公告)日：1989-05-24

    申请号：EP88310573.6

    申请日：1988-11-10

    申请人： Hewlett-Packard Company

    发明人： Chan, C.S. ,  Meyer, Wesley L. ,  Trueba, Kenneth E.

    IPC分类号： C25D1/02 ,  B41J2/005 ,  B23P15/16 ,  B26F1/24

    CPC分类号： B41J2/1625 ,  B26F1/24 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1643 ,  C25D1/02

    摘要： A plastic orifice plate (43) for an ink jet printhead and manufacturing process therefor which includes electroforming a metal die (22) having raised sections (30) thereon of predefined center-to-center spacings, and using the die to punch out openings (32) in a plastic substrate of a chosen thickness to form a plurality of closely spaced orifice openings (36) in the substrate. The orifice plate (43) can be of a chosen transparent material and secured to a printhead substrate where the dynamics of ink flow can be viewed through the orifice plate during printhead testing and evaluation.

    摘要翻译： 一种用于喷墨打印头的塑料孔板（43）及其制造方法，其包括在其上具有预定中心到中心间隔的具有凸起部分（30）的金属模具（22）电铸并使用模具冲出开口 32）在选定厚度的塑料基板中，以在基板中形成多个紧密间隔的孔口（36）。 孔板（43）可以是选择的透明材料，并且固定到打印头基底，在打印头测试和评估期间可以通过孔板观察墨流动的动力学。