公开(公告)号：EP0522168A1

公开(公告)日：1993-01-13

申请号：EP92902728.2

申请日：1992-01-10

申请人： HITACHI, LTD.

发明人： ICHIKAWA, Masakazu 1-50-11, Okusawa ,  HOSOKI, Shigeyuki 2-17-24, Nanyodai ,  UCHIDA, Fumihiko 725-15, Narahara-cho ,  KATO, Shigeo 1-21-21, Iguchi ,  FUJISAKI, Yoshihisa 1-21-32-301, Momijigaoka ,  FUJISAKI, Sumiko 1-21-32-301, Momijigaoka ,  KIKUGAWA, Atsushi Hitachi-Koigakubo-Ryo 74 ,  IMURA, Ryo ,  AOI, Hajime 4-17-44, Wakaba-sho ,  NAKAGAWA, Kiyokazu Sayama-Nyutaun 108-2 ,  MURAKAMI, Eiichi Hitachi-Koyasudai-Apart A404

IPC分类号： H01J37/30 ,  H01L21/20 ,  G01B7/34 ,  G11B9/00

CPC分类号： G11B9/1436 ,  B82B3/00 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/1463 ,  G11B9/1472 ,  G11B11/08 ,  G11B33/14 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/31738 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/947

摘要： A method of finely machining solid surface and, particularly, a novel method and apparatus for machining the surfaces of solid elements on an atomic scale in order to prepare very fine elements and for recording data at ultra-high density. A probe (1) having a sharp end is disposed being opposed to the surface of a sample (4) that is to be machined, a voltage is applied between the probe and the sample to form an electric field large enough to field-vaporize atoms (5) constituting the sample or to field-vaporize atoms (6) constituting the probe. Atoms constituting the sample are field-vaporized and are split off the sample surface or atoms constituting the probe are field-vaporized and are adhered onto the sample surface, thereby to finely machine the sample surface on an atomic scale. Furthermore, a voltage is applied like pulses at any desired position on the sample surface to generate field-vaporization between the probe and the sample while observing the sample surface on an atomic scale based on a surface observation method using a scanning tunnel microscope, in order to remove atoms one by one from the sample surface by field-vaporization.

摘要翻译： 特别是精细加工固体表面的方法，特别是用于以原子尺度加工固体元素表面的新方法和装置，以便制备非常精细的元件并以超高密度记录数据。 具有尖端的探针（1）设置成与要加工的样品（4）的表面相对，在探针和样品之间施加电压，以形成足够大的电场以使原子气化 （5）构成样品或场致气化构成探针的原子（6）。 构成样品的原子被场蒸发并分离出样品表面，或者构成探针的原子被场蒸发并附着到样品表面上，从而以原子尺度精细加工样品表面。 此外，在样品表面上的任何期望位置施加电压，以在样品表面上的任何所需位置施加脉冲以在探针和样品之间产生场蒸发，同时基于使用扫描隧道显微镜的表面观察方法按原子尺度观察样品表面 通过场蒸发从样品表面逐个除去原子。