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14 条记录 (耗时 0.015 秒)

    Scanning tunnel microscope
    1.
    发明公开
    Scanning tunnel microscope 失效
    Rastertunnelmikroskop。

    公开(公告)号：EP0461393A1

    公开(公告)日：1991-12-18

    申请号：EP91107547.1

    申请日：1991-05-08

    申请人： HITACHI, LTD. ,  HITACHI CONSTRUCTION MACHINERY CO., LTD.

    发明人： Hazaki, Eiichi ,  Yamada, Osamu ,  Nakaizumi, Yasushi ,  Hosoki, Shigeyuki ,  Hosaka, Sumio ,  Hashimoto, Akira

    IPC分类号： G01N27/00 ,  H01J37/28

    CPC分类号： G01Q60/16 ,  G01Q30/02 ,  Y10S977/861

    摘要： A scanning tunnel microscope comprising: a SEM stage (23) provided in a specimen chamber (3) of a SEM and having a mechanism (60-64) for moving in a two dimensional manner along a surface perpendicular to an electron beam (34); a specimen stage (25) provided on the SEM stage and provided with a mechanism (26-28) for holding a specimen (33) so that a surface of the specimen makes an angle of 45° with the electron beam and for moving the specimen in a two dimensional manner along the specimen surface; an STM scanning mechanism (41-57) provided on the SEM stage and provided with a probe (41) held perpendicularly to the specimen surface, an approaching mechanism (44-54) for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism (53-56) for making the probe scan along the specimen surface; and a display unit (D1, D2) for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector (4) provided in a specimen chamber (3) and for displaying an image by the STM on the basis of signals from said prove fine movement mechanism.

    摘要翻译： 一种扫描隧道显微镜，包括：设置在SEM的样本室（3）中的具有用于沿垂直于电子束（34）的表面以二维方式移动的机构（60-64）的SEM台（23） ; 设置在SEM台上的具有用于保持试样（33）的机构（26-28）的试样台（25），使得试样的表面与电子束成45°角，并移动试样 沿着试样表面以二维方式; 设置在SEM台上的STM扫描机构（41-57），并且设置有垂直于试样表面保持的探针（41），用于使探针接近到与试样表面垂直的位置的接近机构（44-54） 试样表面和用于使探针沿试样表面扫描的探针精细运动机构（53-56）; 以及显示单元（D1，D2），用于基于从设置在样本室（3）中的二次电子检测器（4）获得的信号和用于显示图像的步骤，通过SEM与探针的图像一起显示图像 由STM根据来自所述证明机芯的信号。

    Charged particle beam apparatus and method of operating it
    6.
    发明公开
    Charged particle beam apparatus and method of operating it 失效
    Ladungsträgerstrahlgerätund Verfahren zum Betrieb desselben。

    公开(公告)号：EP0573891A1

    公开(公告)日：1993-12-15

    申请号：EP93108866.0

    申请日：1993-06-02

    申请人： HITACHI, LTD.

    发明人： Okura, Akimitsu ,  Sato, Mitsugu ,  Yamada, Osamu ,  Nakaizumi, Yasushi ,  Hazaki, Eiichi

    IPC分类号： H01J37/26

    CPC分类号： H01J37/265

    摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory (102) is provided for storing operating conditions of a scanning electron microscope (107) which are associated with identification information for specifying the specimen. The identification information is designated so that at least one operating condition corresponding to the designated identification information is read out from the memory (102), and the read out operating condition is automatically set so that the scanning electron microscope (107) is operated under the set operating condition.

    摘要翻译： 用电子束扫描样本，以产生样本的信号特征，从而根据产生的信号产生图像。 提供存储器（102），用于存储与用于指定样本的识别信息相关联的扫描电子显微镜（107）的操作条件。 指定识别信息，使得从存储器（102）读出与指定的识别信息相对应的至少一个操作条件，并且自动设置读出操作条件，使扫描电子显微镜（107）在 设置运行状态。

    Scanning microscope
    7.
    发明公开
    Scanning microscope 失效
    Rastermikroskop

    公开(公告)号：EP0811999A3

    公开(公告)日：2004-02-25

    申请号：EP97108821.6

    申请日：1997-06-02

    申请人： Hitachi, Ltd.

    发明人： Todokoro, Hideo ,  Yamada, Osamu

    IPC分类号： H01J37/28 ,  G02B21/00

    CPC分类号： H01J37/28 ,  G02B21/002 ,  H01J2237/043 ,  H01J2237/22

    摘要： A scanned image to be observed or to be recorded is formed by N two-dimensional scanning cycles of an irradiating charged particle or light beam. In order to adjust the averaged irradiation intensity of the sample, the irradiating beam can be blanked during some of the N cycles.

    摘要翻译： 通过照射带电粒子或光束的N个二维扫描周期形成待观察或待记录的扫描图像。 为了调整样品的平均照射强度，可以在N个周期的一些期间消除照射光束。

    A scanning microscope and a method of operating such a scanning microscope
    9.
    发明公开
    A scanning microscope and a method of operating such a scanning microscope 失效
    Rastermikroskop und Betriebsverfahren eines solchen Rastermikroskops

    公开(公告)号：EP0753880A1

    公开(公告)日：1997-01-15

    申请号：EP96114222.1

    申请日：1992-08-03

    申请人： HITACHI, LTD.

    发明人： Todokoro, Hideo ,  Yamada, Osamu ,  Otaka, Tadashi

    IPC分类号： H01J37/28 ,  G02B21/00

    CPC分类号： G02B21/002 ,  H01J37/265 ,  H01J37/28

    摘要： A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.

    摘要翻译： 诸如扫描电子显微镜的扫描显微镜具有能够在样品（4）上扫描的能量束（1）。 检测器（6）检测光束（1）与样本（4）的相互作用，并产生用于产生样本（4）的扫描部分的显示图像（20）的样本图像信号。 样本图像信号可以存储在图像存储器（14）中，并且读取这些样本图像信号的一部分以生成显示图像。 这样可以实现有效放大倍数，而不用太近的扫描线扫描样品。 或者或另外，可以在扫描期间间歇地切割光束（1），至少对于超过预定极限的放大率。 在扫描是一系列帧的情况下，一系列扫描线中的每一个，这种切割可以改变帧之间的间隔，线之间的间隔，或者可能导致线内的间歇切割。 所有这些都减少了样品（4）上的光束（1）的持续时间，从而降低了过度电荷积聚的风险。

    A scanning microscope and a method of operating such a scanning microscope
    10.
    发明公开
    A scanning microscope and a method of operating such a scanning microscope 无效
    Rastermikroskop und Verfahren zur Bedienung eines solchen Rastermikroskops。

    公开(公告)号：EP0533330A1

    公开(公告)日：1993-03-24

    申请号：EP92307054.4

    申请日：1992-08-03

    申请人： HITACHI, LTD.

    发明人： Todokoro, Hideo ,  Otaka, Tadashi ,  Yamada, Osamu

    IPC分类号： H01J37/28 ,  G02B21/00

    CPC分类号： G02B21/002 ,  H01J37/265 ,  H01J37/28

    摘要： A scanning microscope, such as a scanning electron microscope, has an energy beam (1) which is caused to scan on a sample (4). A detector (6) detects the interaction of the beam (1) with the sample (4) and generates sample image signals which are used to generate a display image (20) of the scanned part of the sample (4). The sample image signals may be stored in an image memory (14) and a part of those sample image signals read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam (1) may be cut intermittently during the scanning, at least for magnifications above a predetermined limit. Where scanning is in a series of frames, each of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these reduce the duration of the beam (1) on the sample (4), so reducing the risk of excessive charge build-up.

    摘要翻译： 诸如扫描电子显微镜的扫描显微镜具有能够在样品（4）上扫描的能量束（1）。 检测器（6）检测光束（1）与样本（4）的相互作用，并产生用于产生样本（4）的扫描部分的显示图像（20）的样本图像信号。 样本图像信号可以存储在图像存储器（14）中，并且读取这些样本图像信号的一部分以生成显示图像。 这样可以实现有效放大倍数，而不用太近的扫描线扫描样品。 或者或另外，可以在扫描期间间歇地切割光束（1），至少对于超过预定极限的放大率。 在扫描是一系列帧的情况下，一系列扫描线中的每一个，这种切割可以改变帧之间的间隔，线之间的间隔，或者可能导致线内的间歇切割。 所有这些都减少了样品（4）上的光束（1）的持续时间，从而降低了过度电荷积聚的风险。