公开(公告)号：EP4158674B1

公开(公告)日：2024-07-24

申请号：EP21722823.8

申请日：2021-04-29

IPC分类号： H01J37/28 ,  H01J37/26 ,  H01J37/20

CPC分类号： H01J37/28 ,  H01J37/265 ,  H01J2237/2028520130101 ,  H01J2237/2029220130101 ,  H01J2237/248720130101 ,  H01J37/20 ,  H01J2237/3176720130101

公开(公告)号：EP2733721B1

公开(公告)日：2018-04-11

申请号：EP13192844.2

申请日：2013-11-14

申请人： FEI COMPANY

发明人： Arjavac, Jason

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/20292 ,  H01J2237/31749

摘要： A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used to create an image line or an image plane that determines the proper calibrations that are needed. The image line or image plane is then used to calibrate the sample stage so that the sample is aligned substantially normal to the focused ion beam.

公开(公告)号：EP3217419A1

公开(公告)日：2017-09-13

申请号：EP17159706.5

申请日：2017-03-07

申请人： Jeol Ltd.

发明人： SHIMIZU, Yuko ,  YASUHARA, Akira ,  YAMAZAKI, Kazuya ,  HOSOKAWA, Fumio

IPC分类号： H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/1478 ,  H01J37/1471 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/221 ,  H01J2237/223 ,  H01J2237/2802

摘要： There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (-X) relative to the reference axis, the second direction (-X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

摘要翻译： 提供了一种能够在电子显微镜中容易地使电子束与无慧形轴对准的光束对准方法。 该方法开始于相对于参考轴（A）在第一方向（+ X）上倾斜电子束（EB）并获得第一TEM（透射电子显微镜）图像。 然后，光束相对于参考轴在第二方向（-X）上倾斜，第二方向（-X）在参考轴（A）的与第一方向（+ X）相反的一侧上，并且a 获得第二TEM图像。 参考轴增量地变化，以便减小第一TEM图像的功率谱和第二TEM图像的功率谱之间的差分图像的亮度。

公开(公告)号：EP1403901B1

公开(公告)日：2017-04-26

申请号：EP03254620.2

申请日：2003-07-24

申请人： Carl Zeiss Microscopy GmbH

发明人： Preikzsas, Dirk ,  Hubbard, David Ralph

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J2237/0453 ,  H01J2237/1501

公开(公告)号：EP2758980B1

公开(公告)日：2017-03-15

申请号：EP12769987.4

申请日：2012-09-12

申请人： Stiftung caesar Center of Advanced European Studies and Research

发明人： IRSEN, Stephan ,  PATTAI, Steffen

IPC分类号： H01J37/26 ,  H01J37/22

CPC分类号： H01J37/265 ,  H01J37/222 ,  H01J2237/2614

公开(公告)号：EP2706553A3

公开(公告)日：2016-07-27

申请号：EP13183357.6

申请日：2013-09-06

申请人： Carl Zeiss Microscopy GmbH

发明人： Albiez, Michael

IPC分类号： H01J37/141 ,  H01J37/10 ,  H01J37/28 ,  H01J37/26

CPC分类号： G01N23/225 ,  H01J37/10 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/2538

摘要： The invention relates to a particle beam device (1) and to a method for operating the particle beam device (1), in particular an electron beam device, having a beam generator (2) for generating a primary particle beam, having an objective lens (8) for focusing the primary particle beam onto an object (15), and having a detector (17) for detecting particles emitted by the object (15). The objective lens (8) has at least one magnetic unit (11, 12), with the magnetic unit (11, 12) generating at least one first crossover (C1, C1') and at least one second crossover (C2). The first crossover (C1, C1') is arranged in the objective lens (8) or in a region between the objective lens (8) and the object (15). The second crossover (C2) is arranged at the object (15). The invention permits the examination of the object (15) using particles which have a low energy, with good imaging properties.

公开(公告)号：EP2722867A3

公开(公告)日：2016-03-30

申请号：EP13189274.7

申请日：2013-10-18

申请人： FEI COMPANY

发明人： Tuma, Lubomír ,  Josef, Sesták

IPC分类号： H01J37/141 ,  H01J37/20 ,  H01J37/26

CPC分类号： G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

摘要： Configurable charged-particle apparatus ( 100 ) equipped with:
• a charged particle column ( 102 ) comprising
o a charged particle source (104) for producing a beam of charged particles along an optical axis (106); and
o a magnetic immersion lens (107) for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole (108), said first lens pole forming the part of the magnetic immersion lens furthest removed from the charged particle source;
• an excitation coil (110) surrounding the first lens pole;
• at least a first stage (112) on which a sample (114) can be mounted, the first stage movable with respect to the optical axis; and
• one or more detectors (116, 118) for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample;
the immersion lens having a configurable magnetic circuit;
characterized in that
the apparatus has at least a first configuration (FIG. 1) and a second configuration (FIG. 2), the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole (120) mounted on the first stage (112), the second lens pole intersecting the optical axis (106), and the apparatus in the second configuration equipped with a second stage (130) for mounting the sample (114) thereon, the second stage equipped to position the sample between the first lens pole (108) and the second lens pole (120), the second stage movable with respect to the optical axis,
as a result of which the optical properties of the magnetic immersion lens (107) differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

公开(公告)号：EP2988315A2

公开(公告)日：2016-02-24

申请号：EP15177429.6

申请日：2015-07-20

申请人： Carl Zeiss Microscopy GmbH

发明人： Biberger, Josef ,  Lechner, Lorenz ,  Postolski, Michal ,  Pulwey, Ralph ,  Janaszewsk, Marcin

IPC分类号： H01J37/304 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/147 ,  H01J37/265 ,  H01J37/304 ,  H01J2237/30433

摘要： The application relates to a method for analyzing, in particular for imaging, and/or processing of an object as well as a particle beam device for carrying out this method. In particular, the particle beam device of this application is an electron beam device and/or an ion beam device. The method in particular comprises the control unit providing a first control parameter, wherein a beam guiding unit is controlled using the first control parameter for guiding the particle beam and/or wherein a moving unit is controlled using the first control parameter for moving an object holder, correlating a position of the object holder in a second coordinate system to the object position on the surface of the object, identifying a first coordinate transformation between the first coordinate system and the second coordinate system, identifying an orientation position of a distinctive feature on the surface of the object and identifying first coordinates of the orientation position in the first coordinate system, the control unit providing a second control parameter, wherein the second control parameter is used for at least one of: controlling the beam guiding unit for guiding the particle beam, controlling the moving unit for moving the object holder or controlling a detector, identifying again the orientation position of the distinctive feature and identifying second coordinates of the orientation position in the first coordinate system, comparing the first coordinates with the second coordinates, identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement and identifying a position of an area to be analyzed and/or processed on the surface of the object.

摘要翻译： 本申请涉及一种用于分析，特别是用于成像和/或对象的处理，以及用于执行该方法的粒子射线装置。 特别地，本申请的粒子射线装置是电子束装置和/或离子束装置上。 特别地，该方法包括控制单元，其提供第一控制参数，worin光束引导单元使用所述第一控制参数控制用于引导颗粒束和/或worin移动单元使用所述第一控制参数用于移动到对象持有者控制 ，关联于第二对象保持器的位置坐标系统到物体的表面上的对象位置，识别所述第一坐标系和第二坐标系之间的第一坐标变换，确定对一个显着特点的取向位置 所述物体的表面和识别定向位置的第一坐标的第一坐标系中，提供第二控制参数，worin第二控制参数，所述控制单元用于至少一个：控制所述光束引导单元用于引导所述粒子束 ，控制所述移动单元，用于在对象保持器或控制的检测器，ID 再次entifying显着特征的方位位置和第一坐标系中确定方位位置的第二坐标与第二坐标比较第一坐标，确定第一坐标，第二坐标的局部位移，确定第二坐标变换 使用第一坐标变换和局部位移和识别的区域的位置进行分析和/或所述对象的表面上的处理。

公开(公告)号：EP2866245A1

公开(公告)日：2015-04-29

申请号：EP15156053.9

申请日：2015-02-23

申请人： FEI COMPANY

发明人： Lazic, Ivan ,  Bosch, Eric ,  Boughorbel, Faysal ,  Buijsse, Bart ,  Sader, Kasim ,  Lazar, Sorin

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802

摘要： A method of examining a sample in a charged-particle microscope of a scanning transmission type, comprising the following steps:
- Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample;
- Providing a detector for detecting a flux of charged particles traversing the sample;
- Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample,

which method further comprises the following steps:
- Embodying the detector to comprise a plurality of detection segments;
- Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field;
- Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.

摘要翻译： 一种检查扫描透射类型的带电粒子显微镜中的样品的方法，包括以下步骤： - 提供从源通过照射器引导的带电粒子束以照射样品; - 提供用于检测穿过样本的带电粒子通量的检测器; - 使所述光束扫描穿过样品的表面，并且将检测器的输出记录为扫描位置的函数，导致样品的带电粒子图像的积聚，该方法还包括以下步骤： - 实现 该检测器包括多个检测段; - 组合来自检测器不同部分的信号，以便在每个扫描位置产生来自检测器的矢量输出，并编译该数据以产生矢量场; - 通过对所述矢量场进行二维积分运算来对所述矢量场进行数学处理，由此产生积分矢量场图像。

公开(公告)号：EP2530699A4

公开(公告)日：2014-06-04

申请号：EP11734518

申请日：2011-01-21

申请人： HITACHI HIGH TECH CORP

发明人： TSUNETA RURIKO ,  KIKUCHI HIDEKI

IPC分类号： H01J37/22 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/265 ,  H01J2237/221 ,  H01J2237/2809