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公开(公告)号：EP0388813A3
公开(公告)日：1991-08-21
申请号：EP90105012.0
申请日：1990-03-16
发明人： Ueno, Takumi , Shiraishi, Hiroshi , Hayashi, Nobuaki , Fukuma, Emiko (née Aoki) , Tadano, Keiko
IPC分类号： G03F7/004
CPC分类号： G03F7/039 , Y10S430/115 , Y10S430/122
摘要： A pattern can be formed on a substrated using a pattern forming material comprising (a) a medium, e.g. a polymer or compound, having reactivity for changing solubility in an alkali aqueous solution by a reaction using an acid as a catalyst, and (b) as an acid precursor an alkylsulfonic acid ester obtained from a compound having at least two phenolic hydroxyl groups.
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2.发明公开Pattern forming material and process for forming pattern using the same 失效Bildaufzeichnungsmaterial und Bildaufzeichnungsverfahren damit。
公开(公告)号：EP0388813A2
公开(公告)日：1990-09-26
申请号：EP90105012.0
申请日：1990-03-16
发明人： Ueno, Takumi , Shiraishi, Hiroshi , Hayashi, Nobuaki , Fukuma, Emiko (née Aoki) , Tadano, Keiko
IPC分类号： G03F7/004
CPC分类号： G03F7/039 , Y10S430/115 , Y10S430/122
摘要： A pattern can be formed on a substrated using a pattern forming material comprising (a) a medium, e.g. a polymer or compound, having reactivity for changing solubility in an alkali aqueous solution by a reaction using an acid as a catalyst, and (b) as an acid precursor an alkylsulfonic acid ester obtained from a compound having at least two phenolic hydroxyl groups.
摘要翻译： 可以使用图案形成材料在基底上形成图案，所述图案形成材料包括（a）介质，例如， 具有通过使用酸作为催化剂的反应来改变在碱性水溶液中的溶解度的反应性的聚合物或化合物，和（b）作为酸前体的由具有至少两个酚羟基的化合物得到的烷基磺酸酯。
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公开(公告)号：EP0388813B1
公开(公告)日：1997-12-10
申请号：EP90105012.0
申请日：1990-03-16
发明人： Ueno, Takumi , Shiraishi, Hiroshi , Hayashi, Nobuaki , Fukuma, Emiko (née Aoki) , Tadano, Keiko
CPC分类号： G03F7/039 , Y10S430/115 , Y10S430/122
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