公开(公告)号：EP1137056A4

公开(公告)日：2004-09-22

申请号：EP99940570

申请日：1999-08-31

申请人： HITACHI CHEMICAL CO LTD ,  HITACHI LTD

发明人： UCHIDA TAKESHI ,  MATSUZAWA JUN ,  HOSHINO TETSUYA ,  KAMIGATA YASUO ,  TERAZAKI HIROKI ,  HONMA YOSHIO ,  KONDOH SEIICHI

IPC分类号： C09G1/02 ,  C23F3/00 ,  C23F3/06 ,  H01L21/321 ,  H01L21/304 ,  C09G1/04 ,  C23F1/16 ,  C23G1/10 ,  H01L21/308 ,  H01L21/768

CPC分类号： C09G1/02 ,  C23F3/00 ,  C23F3/06 ,  H01L21/3212

摘要： An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.

摘要翻译： 本发明涉及一种用于金属的抛光溶液，其包括：氧化剂; 氧化金属溶解剂; 至少一种选自第一组氨，胺，氨基酸，亚胺，唑类，硫醇和糖类的化合物; 选自第二组聚丙烯酸，聚甲基丙烯酸，聚酰胺酸，聚丙烯酸铵，聚甲基丙烯酸铵，铵聚酰胺和聚丙烯酰胺的至少一种化合物; 和水，以及抛光方法，特别适用于在形成半导体器件的布线的步骤中用于抛光。

公开(公告)号：EP1150341A4

公开(公告)日：2005-06-08

申请号：EP99961474

申请日：1999-12-28

申请人： HITACHI CHEMICAL CO LTD ,  HITACHI LTD

发明人： UCHIDA TAKESHI ,  HOSHINO TETSUYA ,  TERAZAKI HIROKI ,  KAMIGATA YASUO ,  KOYAMA NAOYUKI ,  HONMA YOSHIO ,  KONDOH SEIICHI

IPC分类号： B24B37/00 ,  C09G1/02 ,  C09K13/00 ,  C23F3/00 ,  H01L21/321

CPC分类号： C09G1/04 ,  C09G1/02 ,  C09K13/00 ,  C23F3/00 ,  C23F3/04 ,  C23F3/06 ,  H01L21/3212

摘要： A polishing liquid comprising an oxidizing agent, an etching agent for an oxidized metal, an agent capable of forming a protection film, an agent for assisting the dissolution of said agent capable of forming a protection film, a method for preparing the polishing liquid and a polishing method using the liquid. Also provided are materials for a polishing liquid for a metal including an etching agent for an oxidized metal, an agent capable of forming a protection film, and an agent for assisting the dissolution of said agent capable of forming a protection film.