公开(公告)号：EP2398036A4

公开(公告)日：2013-01-09

申请号：EP10741027

申请日：2010-01-20

Applicant: HITACHI HIGH TECH CORP

Inventor： YAGUCHI TOSHIE ,  NAGAKUBO YASUHIRA ,  KAMINO TAKEO ,  WATABE AKIRA

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

公开(公告)号：EP2541583A4

公开(公告)日：2014-09-03

申请号：EP10846469

申请日：2010-12-01

Applicant: HITACHI HIGH TECH CORP

Inventor： YAGUCHI TOSHIE ,  NAGAKUBO YASUHIRA ,  WATABE AKIRA

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/26 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

公开(公告)号：EP2495748A4

公开(公告)日：2013-12-04

申请号：EP10826621

申请日：2010-10-22

Applicant: HITACHI HIGH TECH CORP

Inventor： YAGUCHI TOSHIE ,  NAGAKUBO YASUHIRA ,  AZUMA JUNZO ,  WATABE AKIRA

IPC: H01J37/20 ,  G01N1/28 ,  G01N23/225 ,  H01J37/18 ,  H01J37/24 ,  H01J37/26

CPC classification number: H01J37/26 ,  G01N23/2204 ,  G01N23/2251 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/24578 ,  H01J2237/2608 ,  H01J2237/2611

Abstract: Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.