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    METHOD AND APPARATUS FOR SLICE AND VIEW SAMPLE IMAGING
    1.
    发明公开
    METHOD AND APPARATUS FOR SLICE AND VIEW SAMPLE IMAGING 审中-公开
    VERFAHREN UND VORRICHTUNG ZUM SCHNEIDEN UND ANZEIGEN EINER PROBENABBILDUNG

    公开(公告)号：EP3149761A4

    公开(公告)日：2017-07-12

    申请号：EP15800579

    申请日：2015-06-11

    Applicant: FEI CO

    Inventor： BROGDEN VALERIE

    IPC: H01J37/26 ,  H01J37/08

    CPC classification number: H01J37/3056 ,  G01N23/2208 ,  G01N23/2251 ,  G01N23/2255 ,  H01J37/26 ,  H01J37/265 ,  H01J37/3023 ,  H01J2237/2611 ,  H01J2237/2814 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: Methods, apparatuses, and systems for slice and view processing of samples with dual beam systems. The slice and view processing includes exposing a vertical wall of a trench formed in a sample surface; capturing a first image of the wall by interrogating the wall with an interrogating beam while the wall is at a first orientation relative to the beam; capturing a second image of the wall by interrogating the wall with the beam while the wall is at a second orientation relative to the beam, wherein first distances in the first image between a reference point and surface points on the wall are different than second distances in the second image between the reference point and the surface points; determining elevations of the surface points using the first distances and the second distances; and fitting a curve to topography of the wall using the elevations.

    Abstract translation: 双光束系统样品切片和视图处理的方法，设备和系统。 切片和视图处理包括暴露形成在样本表面中的沟槽的垂直壁; 通过在壁处于相对于所述束的第一取向时用询问束询问所述壁来捕获所述壁的第一图像; 在所述壁处于相对于所述光束的第二取向时，通过用所述光束询问所述壁来捕获所述壁的第二图像，其中所述第一图像中的参考点与所述壁上的表面点之间的第一距离不同于所述第二距离 在参考点和表面点之间的第二图像; 使用所述第一距离和所述第二距离来确定所述表面点的高度; 并使用这些高程将曲线拟合到墙的地形。

    Charged-particle microscope
    4.
    发明公开
    Charged-particle microscope 审中-公开
    Ladungsträger-Mikroskop

    公开(公告)号：EP2525385A1

    公开(公告)日：2012-11-21

    申请号：EP11166206.0

    申请日：2011-05-16

    Applicant: FEI COMPANY

    Inventor： Phifer, Daniel

    IPC: H01J37/244 ,  H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/2442 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2611 ,  H01J2237/2807 ,  H01J2237/2817

    Abstract: A method of examining a region of interest of a sample using a charged-particle microscope, comprising the following steps:
    - Mounting the sample on a movable sample holder;
    - Providing a particle-optical column that can be used to direct at least one beam of particulate radiation onto at least said region, thereby producing an interaction that causes emitted radiation to emanate from the sample;
    - In a measurement of a first type, using a first detector to detect a first type of said emitted radiation;
    - Using an output of said first detector as a basis to perform at least one of the following actions:
    - Assign a value of a measurand to a given coordinate position within said region, for one or more such coordinate positions;
    - Construct an image of said region,
    wherein the following steps are additionally performed:
    - In a measurement of a second type, using a second detector to detect a second type of said emitted radiation;
    - Providing computer processing apparatus;
    - Using said computer processing apparatus to automatically perform the following actions:
    - Based on an output of said second detector, construct a topographical map of at least a portion of the sample proximal to said region of interest;
    - Based on said topographical map, identify at least one locus of said sample where sample topography is expected to detrimentally affect accuracy of a measurement of the first type performed at that locus, for at least one geometric attitude of said locus with respect to at least one of said beam and said first detector.


    Said computer processing apparatus can be employed to automatically perform at least one of the following actions:
    - Draw the attention of a user of said charged-particle microscope to the existence of said locus;
    - For said locus, indicate an extent to which said accuracy is expected to be detrimentally affected;
    - Calculate at least one modification of said measurement of the first type aimed at improving said accuracy;
    - Enact said modification.

    Abstract translation: 使用带电粒子显微镜检查样品的感兴趣区域的方法，包括以下步骤： - 将样品安装在可移动的样品架上; - 提供可用于将至少一束颗粒辐射引导到至少所述区域的颗粒光学柱，从而产生引起发射的辐射从样品发出的相互作用; - 在第一类型的测量中，使用第一检测器来检测第一类型的所述发射的辐射; - 使用所述第一检测器的输出作为执行以下动作中的至少一个的基础： - 对于一个或多个这样的坐标位置，将被测量的值分配给所述区域内的给定坐标位置; - 构造所述区域的图像，其中另外执行以下步骤： - 在第二类型的测量中，使用第二检测器来检测所述发射的辐射的第二类型; - 提供计算机处理设备; - 使用所述计算机处理装置自动执行以下动作： - 基于所述第二检测器的输出，构建所述样本的至少一部分的至少一部分的地形图，所述至少一部分附近靠近所述感兴趣区域; - 基于所述地形图，识别所述样本的至少一个轨迹，其中样本地形预期会不利地影响在所述轨迹处执行的第一类型的测量的精度，对于至少一个所述轨迹相对于至少一个几何姿态 所述光束和所述第一检测器中的一个。 所述计算机处理装置可以用于自动执行以下动作中的至少一个： - 引起所述带电粒子显微镜的用户对所述轨迹的存在的注意; - 对于所述场所，表示预期会有不良影响的程度; - 计算第一类型的所述测量的至少一个修改，目的是提高所述精度; - 发表修改。

    Transmission electron microscope and method for observing specimen image with the same
    5.
    发明公开
    Transmission electron microscope and method for observing specimen image with the same 有权
    传播电影和Verfahren zur Untersuchung einer探头

    公开(公告)号：EP2315232A2

    公开(公告)日：2011-04-27

    申请号：EP10007999.5

    申请日：2010-07-30

    Applicant: Hitachi, Ltd.

    Inventor： Harada, Ken ,  Sugawara, Akira

    IPC: H01J37/295

    CPC classification number: H01J37/28 ,  H01J37/295 ,  H01J2237/1514 ,  H01J2237/2611 ,  H01J2237/2614

    Abstract: A first electron biprism is disposed in a condenser optical system and an observation region of a specimen is irradiated simultaneously with two electron beams of different angles. The two electron beams that have simultaneously transmitted the specimen are spatially separated and focused with a second electron biprism disposed in an imaging optical system and two electron microscopic images of different irradiation angles are obtained. The two picture images are obtained by a detecting unit. Based on the two picture images, a stereoscopic image or two images having different kinds of information of the specimen is/are produced and displayed on a display device.

    Abstract translation: 第一电子双棱镜设置在聚光镜系统中，并且与两个不同角度的电子束同时照射样本的观察区域。 同时透射样品的两个电子束在空间上分离并且与设置在成像光学系统中的第二电子双棱镜聚焦，并且获得不同照射角度的两个电子显微镜图像。 两个图像由检测单元获得。 基于两张图像，生成具有不同种类的样本的立体图像或两张图像，并将其显示在显示装置上。

    TOMOGRAPHIC IMAGING METHOD
    7.
    发明公开
    TOMOGRAPHIC IMAGING METHOD 审中-公开
    层析成像法

    公开(公告)号：EP3297018A1

    公开(公告)日：2018-03-21

    申请号：EP16189519.8

    申请日：2016-09-19

    Applicant: FEI Company

    Inventor： Schoenmakers, Remco ,  Potocek, Pavel

    IPC: H01J37/22 ,  G06T11/00 ,  H01J37/28

    CPC classification number: G06T11/003 ,  G06T11/005 ,  G06T2211/424 ,  G06T2211/436 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

    Abstract: A method of investigating a specimen using tomographic imaging, comprising the following steps:
    - Providing a specimen on a specimen holder;
    - Directing a beam of radiation through the specimen and onto a detector, thereby generating an image of the specimen;
    - Repeating said directing step for a set of different specimen orientations relative to said beam, thereby generating a corresponding set of images;
    - Using an iterative mathematical reconstruction technique to convert said set of images into a tomogram of at least a portion of the specimen;
    - Mathematically constraining said reconstruction, so as to curtail a solution space resulting therefrom,
    additionally comprising the following steps:
    - Obtaining three-dimensional SEM imagery of at least a part of the specimen that overlaps at least partially with said portion;
    - Using said SEM imagery to perform said constraining step, by requiring iterative results of said reconstruction to be consistent with pixel values derived from said SEM imagery.

    Abstract translation: 一种使用断层成像研究样本的方法，包括以下步骤： - 在样本架上提供样本; - 将一束辐射通过样本并引导到检测器上，从而产生样本的图像; - 对于相对于所述光束的一组不同的样本取向重复所述引导步骤，从而生成相应的一组图像; - 使用迭代数学重建技术将所述一组图像转换成至少一部分样本的断层图像; - 在数学上约束所述重建以便减少由此产生的解空间，附加地包括以下步骤： - 获得至少部分与所述部分重叠的样本的至少一部分的三维SEM图像; - 通过要求所述重建的迭代结果与从所述SEM图像导出的像素值一致，使用所述SEM图像来执行所述约束步骤。

    DECONVOLUTION OF TIME-GATED CATHODOLUMINESCENCE IMAGES
    10.
    发明公开
    DECONVOLUTION OF TIME-GATED CATHODOLUMINESCENCE IMAGES 有权
    时间选通阴极发光图像的去卷积

    公开(公告)号：EP2622330A1

    公开(公告)日：2013-08-07

    申请号：EP11760455.3

    申请日：2011-09-16

    Applicant: Attolight SA

    Inventor： BERNEY, Jean

    IPC: G01N23/225 ,  H01J37/22

    CPC classification number: G21K1/00 ,  G01N23/2254 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/06333 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/30472

    Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.

    Abstract translation: 一种用于产生阴极发光图谱的方法，包括以下步骤：产生强度调制的带电粒子束; 将所述带电粒子束聚焦在样本上; 暂时控制由所述样本发射的阴极发光，以提供时间门控的阴极发光; 测量样本上不同带电粒子束位置的时间门控阴极发光，以产生阴极发光图谱; 去卷积阴极发光图以改善所述阴极发光图的分辨率。 本发明还提供了用于执行这些方法的设备。

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