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1.发明公开CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING POSITION WITH RESPECT TO CHARGED PARTICLE BEAM 审中-公开与对于带电粒子束位置修正带电粒子束和方法的装置
公开(公告)号：EP2402978A4
公开(公告)日：2013-08-07
申请号：EP09840714
申请日：2009-10-23
Applicant: HITACHI HIGH TECH CORP
Inventor： MADOKORO YUICHI , AIZAWA MEGUMI , YOSHIZAWA YUKIO
IPC: H01J37/147 , H01J37/153 , H01J37/22 , H01J37/28 , H01J37/30 , H01J37/304 , H01J37/305
CPC classification number: H01J37/28 , H01J37/153 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/15 , H01J2237/1536 , H01J2237/20207 , H01J2237/221 , H01J2237/30483 , H01J2237/31745
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