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公开(公告)号：EP0324620A1
公开(公告)日：1989-07-19
申请号：EP89300266.7
申请日：1989-01-12
CPC分类号： G01P9/00
摘要： Disclosed is a gas rate sensor system which provides an output signal, representing an angular velocity of the gas rate sensor, when the gas flows more on one of its thermal sensing elements (14a or 14b) than on the other (14a and 14b), due to the effect of the angular velocity on the gas flow. The gas rate sensor system can carry out an arithmetic operation for correction of the gas rate sensor output signal, using and updatable offset value to account for the instantaneous temperature change in the gas rate sensor.
摘要翻译： 公开了一种气体速率传感器系统，当气体在其热传感元件（14a或14b）中的一个上流动比在另一个（14a和14b）上流动更多时提供表示气体速率传感器的角速度的输出信号， 由于角速度对气流的影响。 气体速率传感器系统可以执行用于校正气体速率传感器输出信号的算术运算，使用和可更新的偏移值来考虑气体速率传感器中的瞬时温度变化。
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公开(公告)号：EP0405452A3
公开(公告)日：1991-03-27
申请号：EP90112140.0
申请日：1990-06-26
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A gas flow type angular velocity sensor comprising two semiconductor substrates with all components formed thereon by use of a semiconductor technology and an IC technology, which are coupled with each other to form therein a pair of heat wires, a gas path and a nozzle holes for injecting a gas flow toward the paired heat wires in the gas path. Two heat wires of the pair changes their resistance-temperature characteristics in accordance with a deflection of the gas flow due to the action of angular velocity and a difference between two changed values is picked up and amplified by a resistance bridge circuit and an amplifier circuit formed on the semiconductor substrates to produce an output signal proportional to the angular velocity to be measured. A miniature pump formed on semiconductor substrates and drivable by a piezoelectric element provides a stabilized gas flow in the sensor. Thus constructed sensor is compact, accurate and suitable for mass-production and free from disadvantages of conventional sensors.
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公开(公告)号：EP0405452A2
公开(公告)日：1991-01-02
申请号：EP90112140.0
申请日：1990-06-26
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A gas flow type angular velocity sensor comprising two semiconductor substrates with all components formed thereon by use of a semiconductor technology and an IC technology, which are coupled with each other to form therein a pair of heat wires, a gas path and a nozzle holes for injecting a gas flow toward the paired heat wires in the gas path. Two heat wires of the pair changes their resistance-temperature characteristics in accordance with a deflection of the gas flow due to the action of angular velocity and a difference between two changed values is picked up and amplified by a resistance bridge circuit and an amplifier circuit formed on the semiconductor substrates to produce an output signal proportional to the angular velocity to be measured. A miniature pump formed on semiconductor substrates and drivable by a piezoelectric element provides a stabilized gas flow in the sensor. Thus constructed sensor is compact, accurate and suitable for mass-production and free from disadvantages of conventional sensors.
摘要翻译： 一种气流式角速度传感器，包括通过使用半导体技术和IC技术在其上形成的所有部件的两个半导体基板，它们彼此耦合以在其中形成一对热丝，气路和喷嘴孔 向气体路径中的成对热丝喷射气流。 该对中的两根热丝根据角速度的作用而根据气流的偏转而改变它们的电阻温度特性，并且两个改变值之间的差被拾取并通过电阻桥电路和形成的放大器电路放大 在半导体衬底上产生与要测量的角速度成比例的输出信号。 形成在半导体基板上并由压电元件驱动的微型泵在传感器中提供稳定的气流。 这样构造的传感器是紧凑的，准确的并且适合于批量生产并且没有常规传感器的缺点。
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