公开(公告)号：EP1141554B1

公开(公告)日：2005-11-16

申请号：EP99946950.5

申请日：1999-09-10

申请人： HONEYWELL INC.

发明人： CABUZ, Cleopatra ,  OHNSTEIN, Thomas, R. ,  ELGERSMA, Michael, R.

IPC分类号： F15B15/10

CPC分类号： F16K99/0001 ,  B64C3/38 ,  B64C3/46 ,  B64C13/48 ,  B64C13/50 ,  B64C21/10 ,  B64C23/005 ,  B81B3/0054 ,  B81B2203/053 ,  F04B43/043 ,  F15B15/103 ,  F15C5/00 ,  F15D1/12 ,  F16K99/0015 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0078 ,  H02N1/006 ,  Y02T50/166

摘要： An actuator device providing an active surface. The actuator has a base (23) having at least one first electrostatic electrode mounted therein which is oriented for electrostatic cooperative action with an opposing electrostatic electrode in a cover (25) mounted above the first electrostatic electrode to define an enclosed cavity. The cover (25) has at least one second electrostatic electrode for cooperative electrostatic activation between the electrostatic electrodes. The cover (25) also has an outer surface forming the active surface. A power supply is operably connected to the electrostatic electrodes for causing the cooperative electrostatic activation. A quantity of fluid is contained within the cavity for pneumatically defining active surface conditions during cooperative electrostatic actuation. The cavity may be closed to provide a sealed cavity for movement of the fluid, either a gas or a liquid, during the cooperative electrostatic actuation, or it may be open to the atmosphere. The electrostatic electrodes may comprise a plurality of electrostatic electrodes arranged in a pattern to cause a predetermined change in the active surface. Various patterns may be used, such as bands, patches and regions. Also provided is control electronics in the base for controlling application of power from the power supply.

公开(公告)号：EP1127403B1

公开(公告)日：2002-10-02

申请号：EP98956646.8

申请日：1998-11-06

申请人： HONEYWELL INC.

发明人： CABUZ, Cleopatra ,  OHNSTEIN, Thomas, R. ,  HERB, William, R.

IPC分类号： H02N1/00 ,  F15C5/00

CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0051 ,  F16K2099/0074 ,  H02N1/004

摘要： An electrostatic actuator device including a stationary support (11) and a buckled, moveable support mounted positioned to enter into contact with the stationary support (13). At least three electrodes (15, 17, 19) are employed. The first (15) is mounted on the moveable support (13) and a second (17) electrode is on the stationary support. A third electrode (19) is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply (25, 27, 29) to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode (13) has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage.

公开(公告)号：EP1212532A1

公开(公告)日：2002-06-12

申请号：EP00965096.1

申请日：2000-09-15

申请人： Honeywell Inc.

发明人： HERB, William, R. ,  CABUZ, Cleopatra ,  ZOOK, David, J.

IPC分类号： F04B43/02 ,  F04B43/04

CPC分类号： F04B43/043 ,  A61M5/14224 ,  A61M5/14276

摘要： A diaphragm pump has first and second diaphragms each having a set of valve holes (the two sets being non-aligned) in the diaphragm surface thereof, one inlet port and one outlet port. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the two diaphragms independently to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump.

公开(公告)号：EP1163446A1

公开(公告)日：2001-12-19

申请号：EP98965368.8

申请日：1998-11-06

申请人： HONEYWELL INC.

发明人： CABUZ, Cleopatra

IPC分类号： F04B45/047

CPC分类号： F04B43/043 ,  F04B43/025 ,  F04B45/043 ,  F04B45/047

摘要： A mesopump having a plurality of elementary cells, a process for making the same, and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable diaphragm is mounted with its major portion located in the cavity between the electrodes so that the diaphragm deflects toward the upper or lower surfaces to conform thereto. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The lateral conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells are interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into and out of the body. The preferred mesopump includes sets of three cell groups so that fluid enters a first cell from a source of fluid, is expelled to a second cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.

公开(公告)号：EP1224458B1

公开(公告)日：2009-11-18

申请号：EP00991851.7

申请日：2000-10-26

申请人： HONEYWELL INC.

发明人： ZOOK, David, J. ,  CABUZ, Cleopatra

IPC分类号： G01N33/00 ,  G01N1/24 ,  G01N1/26 ,  F04B43/04 ,  F04B43/00

CPC分类号： G01N33/0026 ,  G01N1/24 ,  G01N33/0011 ,  Y10T436/11 ,  Y10T436/25 ,  Y10T436/25375 ,  Y10T436/2575 ,  Y10T436/25875

公开(公告)号：EP1145419A1

公开(公告)日：2001-10-17

申请号：EP99962942.1

申请日：1999-11-30

申请人： Honeywell Inc.

发明人： CABUZ, Cleopatra ,  CABUZ, Eugen, L.

IPC分类号： H02N1/00

CPC分类号： H02N1/006

摘要： An electrostatic actuator array having at least one cell, in which the individual cells share a common electrode. Each cell includes first and second electrodes separated by a distance and having a moveable diaphragm mounted there between for conducting a voltage potential thereto. One of the pair is moveable with respect to the other, and the pair are positioned to move upon application of a voltage potential thereto by electrodes attached thereto. A voltage potential producing an alternate polarity field generated from a single DC power supply is selectively provided to the electrodes to cause the movement. The preferred signals from the power supply are uni-polar square wave signals, preferably deriving the alternate polarity field from a DC current having time allocation of signals to present alternating fields to each actuator. The individual cells are configured in an actuator array wherein some cells operate out of phase with adjoining cells. The plurality of actuation cells equals n, having 2n electrodes, where n is an integer of at least 2. A preferred actuator array comprises n actuation cells working out of phase with 2n electrodes driven with n+1 unipolar signals.

公开(公告)号：EP1145417A1

公开(公告)日：2001-10-17

申请号：EP99957588.9

申请日：1999-11-23

申请人： HONEYWELL INC.

发明人： CABUZ, Cleopatra ,  HORNING, Robert, D. ,  HERB, William, R.

IPC分类号： H02N1/00

CPC分类号： H02N1/006 ,  Y10T29/42

摘要： A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 νm to about 100 νm thick and the cells preferably have an individual displacement of from about 5 νm to about 200 νm.

公开(公告)号：EP1212532B1

公开(公告)日：2007-02-14

申请号：EP00965096.1

申请日：2000-09-15

申请人： HONEYWELL INC.

发明人： HERB, William, R. ,  CABUZ, Cleopatra ,  ZOOK, David, J.

IPC分类号： F04B43/02 ,  F04B43/04

CPC分类号： F04B43/043 ,  A61M5/14224 ,  A61M5/14276

摘要： A diaphragm pump has first and second diaphragms each having a set of valve holes (the two sets being non-aligned) in the diaphragm surface thereof, one inlet port and one outlet port. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the two diaphragms independently to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump.

公开(公告)号：EP1224458A2

公开(公告)日：2002-07-24

申请号：EP00991851.7

申请日：2000-10-26

申请人： Honeywell Inc.

发明人： ZOOK, David, J. ,  CABUZ, Cleopatra

IPC分类号： G01N33/00 ,  G01N1/24 ,  G01N1/26 ,  F04B43/04 ,  F04B43/00

CPC分类号： G01N33/0026 ,  G01N1/24 ,  G01N33/0011 ,  Y10T436/11 ,  Y10T436/25 ,  Y10T436/25375 ,  Y10T436/2575 ,  Y10T436/25875

摘要： A sampling system for detecting an analyte, comprising a diaphragm pump, a buffer chamber, a sensor head and intake port. The pump includes a chamber for receiving fluids via first and second ports. A buffer chamber is located at the second port for holding a quantity of air, and a sensor head is adapted to identify the presence of a desired analyte and produce a signal in response to the quantity identified. Preferably the diaphragm pump has a volume of gas per stroke capacity slightly larger than the volume of the sensor head such that the pump chamber has a greater volume than the buffer chamber and the buffer chamber has about the same volume as the sensor head. A sensor intake port intakes a sample potentially containing the analyte for contact with the sensor head upon operation of the diaphragm pump and out of the sensor head by jet-action caused by rapid movement of the diaphragm pump. A filter may be used for filtering air drawn through the pump chamber. The diaphragm pump may be either a single chamber pump or a multiple chamber diaphragm mesopump. In the purging mode, the system can also contain a pump for filling the system with cleaned air. When a mesopump is used, a single pumping channel can provide both AC and DC operation.

公开(公告)号：EP1145418A1

公开(公告)日：2001-10-17

申请号：EP99960627.0

申请日：1999-11-30

申请人： Honeywell Inc.

发明人： CABUZ, Cleopatra ,  CABUZ, Eugen, L.

IPC分类号： H02N1/00

CPC分类号： H02N1/002 ,  H01H47/002 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T307/747 ,  Y10T307/826

摘要： An electrostatic actuator and drive configuration device for use in a system requiring a long term ON state operation. The device includes a first electrostatic actuator positioned to operate in the system requiring the long term ON state upon activation of a power supply. The device also includes a second electrostatic actuator positioned to operate in the system requiring the long term ON state upon activation of the power supply. A timer is connected to the power supply to alternately select the first or the second actuator for activation to drive the selected actuator to the ON state. The timer is controlled to select the first or second electrostatic actuator on an alternating basis to prevent either electrostactic actuator from remaining in the ON state for more than a predetermined time without the other actuator being selected. The electrostatic actuators may be configured in parallel or in series, depending upon the demands of the system. When the electrostatic actuators are switches, linear actuators or relays, they are normally connected side by side mechanically parallel. When the actuators are shutters, mirrors or valves, normal connection is in sequence end to end. When devices are selected to be in the ON condition, the selection should be such that each device is closed before the other is opened.