公开(公告)号：EP3059755A1

公开(公告)日：2016-08-24

申请号：EP14853543.8

申请日：2014-09-03

申请人： Hamamatsu Photonics K.K.

发明人： ISHII, Atsushi ,  SUZUKI, Naonobu

IPC分类号： H01J35/08 ,  H01J35/30

CPC分类号： H01J35/08 ,  A61B6/547 ,  H01J1/88 ,  H01J1/92 ,  H01J1/94 ,  H01J3/26 ,  H01J19/32 ,  H01J19/46 ,  H01J19/48 ,  H01J21/36 ,  H01J35/14 ,  H01J35/32 ,  H01J37/1472 ,  H01J2235/08 ,  H01J2235/081 ,  H01J2235/086 ,  H01J2235/087 ,  H01J2235/088 ,  H01J2235/186 ,  H01J2237/032 ,  H01J2237/036 ,  H01J2893/0003 ,  H01J2893/0051 ,  H01J2893/0052 ,  H05G1/52

摘要： An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T.